Warning: Undefined array key "HTTP_ACCEPT_ENCODING" in /mnt/web508/d3/15/536615/htdocs/relaunch.mbe-komponenten.de/includes/general.inc.php on line 15 Deprecated: preg_match(): Passing null to parameter #2 ($subject) of type string is deprecated in /mnt/web508/d3/15/536615/htdocs/relaunch.mbe-komponenten.de/includes/general.inc.php on line 15
Flange size DN 100 ISO-K
Patented Thermal Conduction Cooling (TCC)
Ideal for evaporation of organic materials
for PV, display and OLED applications
Fast and precise temperature control
Temperature range 15-400°C
Fully UHV and MBE compatibility
The Organic Material Effusion Cell OME is specially designed for the evaporation or sublimation of high vapor pressure materials, notably sensitive organic substances, at operating temperatures up to 400°C. It can likewise be used for other materials typically evaporated at very low temperatures, e.g. alkali metals. Due to its patented Thermal Conduction Cooling with encapsulated heater unit, the OME offers drastically improved operation properties below the lowest temperature limit of common Knudsen-type effusion cells. The novel As an option we offer the TCC concept for the OME 100-75, which involves a liquid metal used as a thermal conductor that provides a direct thermal connection between crucible and heat reservoir, leaving no isolating voids. |
Schematic drawing of the TCC technique as applied in the OME |
Temperature fluctuation during long-term operation for the OME 40 cell |
Technical data |
|
Mounting flange |
DN100 ISO-K or larger |
Length in vacuum |
180-400nm |
Heating system |
Encapsulated Ta-wire heater with patented TCC-technique |
Temperature sensor | NiCr/NiAl (type K) thermocouple |
Bakeout temperature | 250°C |
Operating temperature / stability | 15°C1) - 400°C2); <±0,02K |
Cooling | integrated water cooled heat sink; water flow > 0.5l/min |
Crucibles | 18 cm³ larger sizes on request |
Crucible Material | Cu, Ni, Au, Quartz (Liner) |
Crucible / Liner | 180-00-612 / 480-00-028 |
max. Power / Current | 400W, 12A, Power Supply: PS 40-19 |
Shutter | Integrates rotary shutter (S); tight sealing shutter (TS) |
[1] lowest operation temperature depends on colling media temperature
[2] 300°C is recommended for max. long term temperature in case of TCC version
The following list provides suggestions for related products. For additional product suggestions or more detailed information, please contact us.
Components
Standard Effusion Cell WEZ |
Low Temperature Effusion Cell NTEZ |
Quad Cluster Source QCS |
Accessories
Soft-acting Rotary Shutter Module RSM |
Quartz Crystal Monitor QCM |
Systems
OCTOPLUS 300 |