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linear vapor source PEZ SCU e-beam evaporator valved cracker DCS Crucibles CRU transfer rod Linearverdampfer valved thermal deposition source Cs/Rb-Valved Alkali Metal Source AKS OEZ Cluster mask Oxygen Atom Beam Source OBS Oxygen Resistant Substrate Manipulator SH-O Rotary Pneumatic Module RPM Dotierzelle rapid thermal annealing DECO BFM in-situ monitoring WEZ thermal evaporation VGCS SH OLED MBE sample transfer OME-100 Organic Material Effusion Cell OEZ Effusionszelle

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