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EBVV Crucibles CRU transfer rod Ga-trapping-cap system Thin Film Systems OEZ Cluster effusion cell High Temperature Source HTS Oxygen Atom Beam Source OBS II-VI MBE Valved Arsenic Cracker Source VACS SCU rapid thermal processing RTP organic deposition system BFM in-situ monitoring Vakuumsublimation SH Organic Material Effusion Cell OME OME-100 soft acting shutter atomic hydrogen source Silicon Sublimation Dopant Source SUSI-D customized evaporators Rotary Pneumatic Module RPM organic material evaporator HGS beam shaping gas source customized MBE systems

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