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Keyword: rapid thermal processing RTP

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organic deposition system Crucibles CRU valved thermal deposition source transfer rod Cs/Rb-Valved Alkali Metal Source AKS OEZ Cluster mask effusion cell Oxygen Atom Beam Source OBS linear vapor source PEZ II-VI MBE SCU DCS organic material evaporator BFM beam shaping thermal evaporation in-situ monitoring VGCS Vakuumsublimation SH sample transfer Organic Material Effusion Cell OEZ OME-100 Oxygen Resistant Substrate Manipulator SH-O atomic hydrogen source Rotary Pneumatic Module RPM customized evaporators DECO

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