VEECO in Wafer Heater WH - Dr. Eberl MBE-Komponenten GmbH The wafer heaters or heated stations - WH - are suited for all substrate heating applications where the full functionality of a substrate manipulator is not required.
VEECO in Effusion Cells - Dr. Eberl MBE-Komponenten GmbH Effusion cells for different temperature scales, capacities, partly with thermal cracking or oxygen resistance as well as sublimation and decomposition sources.
VEECO in OCTOPLUS 300 - Dr. Eberl MBE-Komponenten GmbH The OCTOPLUS 300 system is ideally suited for material deposition onto small samples. It ensures a good accessability and easy operation and maintenance.
VEECO in OCTOPLUS-O 400 - Dr. Eberl MBE-Komponenten GmbH The OCTOPLUS-O 400 MBE system features a unique dual zone design with differential pumping that allows depositing oxide layers under high partial pressure.
VEECO in OCTOPLUS 500 EBV - Dr. Eberl MBE-Komponenten GmbH The OCTOPLUS 500 EBV system has been developed for the growth of high quality Si/SiGe heterostructures on 4 inch or 6 inch Si substrates.