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High Temperature Source HTS SH-O organic deposition system Valved Arsenic Cracker Source VACS Thermostar rapid thermal processing RTP EBVV RPM effusion cell Ga-trapping-cap system Thin Film Systems Cooling Shrouds CS LN2 cooling shroud II-VI MBE Organic Material Effusion Cell OME VSS plasma source organic material evaporator beam shaping soft acting shutter Silicon Sublimation Dopant Source SUSI-D Vakuumsublimation HGS Soft-acting Rotary Shutter Module RSM MCU SiGe MBE atomic hydrogen source customized evaporators Point Sources PEZ-G ozone injection

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