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Keyword: atomic oxygen

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linear vapor source Knudsen cell PEZ metal evaporation Oxygen Atom Beam Source OBS manipulator DCS SCU valved thermal deposition source PVD Cs/Rb-Valved Alkali Metal Source AKS Crucibles CRU transfer rod mask OEZ Cluster OME-100 III-V MBE DECO Rotary Pneumatic Module RPM thermal evaporation organic evaporator VGCS atomic hydrogen BFM in-situ monitoring sample transfer Organic Material Effusion Cell OEZ SH Verdampferquelle Oxygen Resistant Substrate Manipulator SH-O

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