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Keyword: Organische Halbleiter

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Valved Arsenic Cracker Source VACS Cooling Shrouds CS LN2 cooling shroud manipulator rapid thermal processing RTP EBVV SH-O PVD Ga-trapping-cap system Thin Film Systems Thermostar High Temperature Source HTS RPM Knudsen cell metal evaporation SiGe MBE III-V MBE HGS VSS plasma source organic evaporator atomic hydrogen Organic Material Effusion Cell OME Soft-acting Rotary Shutter Module RSM Verdampferquelle soft acting shutter Silicon Sublimation Dopant Source SUSI-D MCU Valved Selenium Cracking Source VSCS Point Sources PEZ-G

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