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Ga-trapping-cap system Thin Film Systems Thermostar e-beam evaporator High Temperature Source HTS valved cracker RPM Linearverdampfer Valved Arsenic Cracker Source VACS Cooling Shrouds CS LN2 cooling shroud rapid thermal processing RTP EBVV SH-O Dotierzelle Organic Material Effusion Cell OME rapid thermal annealing Soft-acting Rotary Shutter Module RSM soft acting shutter WEZ Silicon Sublimation Dopant Source SUSI-D MCU SiGe MBE OLED MBE HGS VSS plasma source Thin Film Sources Karl Eberl Effusionszelle

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