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Keyword: CIGS evaporation system

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SCU DCS Crucibles CRU valved thermal deposition source transfer rod Cs/Rb-Valved Alkali Metal Source AKS OEZ Cluster mask molecular beam epitaxy point source Oxygen Atom Beam Source OBS linear vapor source PEZ CIGS source RTP DECO BFM thermal evaporation in-situ monitoring VGCS vacuum deposition cooling shroud SH sample transfer Organic Material Effusion Cell OEZ OME-100 Oxygen Resistant Substrate Manipulator SH-O k-cell organic evaporation system Rotary Pneumatic Module RPM

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