Information on the angular flux distribution, resulting flow rate distribution, material composition on the substrate, and material efficiency: optimization of the system design.
Simulation of the beam distribution of evaporation sources and the deposition of material on a substrate.
Information on the angular flux distribution, resulting flow rate distribution, material composition on the substrate, and material efficiency: optimization of the system design.
Information on the angular flux distribution, resulting flow rate distribution, material composition on the substrate, and material efficiency: optimization of the system design.