The MSCU is the power supply and controller for multi-position shutter modules. You may choose between manual and remote controlled shutter operation.
The RPM is a drive unit for rotary shutter motion. Its torque reaches 0.85 Nm at 6 bar air supply.
We provide a variety of cell shutters designed for different evaporation sources. The shutter can be operated manually or by a soft-acting shutter module.
The SCU is the power supply and controller for different soft-acting shutter modules. You may choose between manual and remote controlled shutter operation.
The LSM consists of a soft-acting linear motion mechanism, driven by an electric motor and acting upon a magnetically coupled linear motion feedthrough.
The RSM is a drive unit for rotary shutter motion that provides a "soft", nearly sinusoidal angular velocity profile between two angular shutter positions.
The Viewport Shutters FSH are high-quality swing shutters used to cover and protect all kinds of viewports in UHV systems.