The Valved Sulfur Source VSS aims at R&D applications where valve controlled small or medium flux rates of high vapor pressure materials are required.
The Vertical Electron Beam Evaporator EBVV features a complete electromagnetic x- and y-dynamic beam deflection system with small footprint.
The Viewport Shutters FSH are high-quality swing shutters used to cover and protect all kinds of viewports in UHV systems.
The wafer heaters or heated stations - WH - are suited for all substrate heating applications where the full functionality of a substrate manipulator is not required.