The patented Organic Material Effusion Cell OME was specially designed for the evaporation of volatile organic substances at operating temperatures up to 300°C.
The Oxygen Atom Beam Source OBS is a thermal gas cracker that produces an ion-free oxygen gas beam, avoiding ion induced damage to the substrate.
OREZ Oxygen Resistant Effusion Cells with nickel or noble metal heaters meet the requirements of oxide MBE applications with high oxygen background pressure.
Using SiC or noble metal heaters, MBE-Komponenten offers substrate manipulators and heated stations that are resistant to oxygen or other corroding atmospheres.
PEZ Production Effusion Cells are designed to meet the particular requirements of production MBE systems, allowing the evaporation of a variety of elements.
Quad Cluster Sources are designed as four-cell-clusters. They can add more sources to your MBE system, either as thin-film deposition source in nanosciences or as doping source.
The RPM is a drive unit for rotary shutter motion. Its torque reaches 0.85 Nm at 6 bar air supply.
We provide a variety of cell shutters designed for different evaporation sources. The shutter can be operated manually or by a soft-acting shutter module.
The SCU is the power supply and controller for different soft-acting shutter modules. You may choose between manual and remote controlled shutter operation.
Excellent growth of thin silicon layers, short period Si/Ge superlattices and Si/SiGe heterostructures by means of high purity intrinsic or highly doped Si filament.
The LSM consists of a soft-acting linear motion mechanism, driven by an electric motor and acting upon a magnetically coupled linear motion feedthrough.