The industrial point sources OME 100 with fast and precise temperature control are ideal for evaporation of organic materials for PV, display and OLED applications.
Main purpose of the Loadlock Heater WH 40 is the controlled heating of both chamber walls and substrates within a loadlock under ultra-high vacuum conditions.
Manual and remote control of rotation speed, direction of rotation and start/stop is possible. The control signals can be set manually, with TTL signals or with external relays.
The Motorized Valve Control Unit (MVCU) provides the power and control for the stepper motor drive which moves the mechanical valve mechanism inside a valved effusion cell.
Our Multi-pocket E-Beam Evaporators combine flexibility in evaporating up to four different materials from a single source for thin film growth requirements.
The MSCU is the power supply and controller for multi-position shutter modules. You may choose between manual and remote controlled shutter operation.
The OEZ-Cluster Sources offer two/four effusions cells on a single flange, designed for controlled evaporation of all kind of volatile organic materials.
Thermal evaporators of the OEZ type are dedicated to the controlled evaporation of all kind of volatile organic materials.
The patented Organic Material Effusion Cell OME was specially designed for the evaporation of volatile organic substances at operating temperatures up to 300°C.
The Oxygen Atom Beam Source OBS is a thermal gas cracker that produces an ion-free oxygen gas beam, avoiding ion induced damage to the substrate.
OREZ Oxygen Resistant Effusion Cells with nickel or noble metal heaters meet the requirements of oxide MBE applications with high oxygen background pressure.