The Decomposition Source DECO is an ultra-pure source for P2 based on the decomposition of GaP. It is an affordable and easily operated alternative to valved phosphorus sources.
The High Temperature Source HTS allows evaporation of high vapor pressure materials, thereby combining very uniform material deposition with high flux rates.
The operation of any electron beam evaporator requires a well-matching set of power supplies and a control unit, in order to generate and guide the electron beam.
The Hydrogen Atom Beam Source HABS is a thermal gas cracker that produces an absolutely ion-free hydrogen gas beam, avoiding ion induced damage to the substrate.
The industrial point sources OME 100 with fast and precise temperature control are ideal for evaporation of organic materials for PV, display and OLED applications.
Main purpose of the Loadlock Heater WH 40 is the controlled heating of both chamber walls and substrates within a loadlock under ultra-high vacuum conditions.
Manual and remote control of rotation speed, direction of rotation and start/stop is possible. The control signals can be set manually, with TTL signals or with external relays.
Our Multi-pocket E-Beam Evaporators combine flexibility in evaporating up to four different materials from a single source for thin film growth requirements.
The MSCU is the power supply and controller for multi-position shutter modules. You may choose between manual and remote controlled shutter operation.
The OEZ-Cluster Sources offer two/four effusions cells on a single flange, designed for controlled evaporation of all kind of volatile organic materials.
Thermal evaporators of the OEZ type are dedicated to the controlled evaporation of all kind of volatile organic materials.