Quad Cluster Source QCS

Source clusters increase the capacity of MBE systems
4 cells on one DN40CF (2.75") flange or DN63CF (4.5") flange
Very compact cell design
Various crucible types and sizes available
Integrated water cooling
Multi-position shutter for QCS 40 and QCS 63 Datasheet

Introduction

Source clusters can add more sources to your MBE system, either as thin-film deposition source in nanosciences or as doping source. Because of the large variety of different UHV systems each cluster is individually designed. We offer a large variety of source clusters based on our standard evaporation cells with four different cells mounted on a single flange.
By default the “quad” cluster sources are designed as four-cell-clusters. However we are to supply customized solutions with two cells, e.g., Dual Cluster Sources DCS on one mounting flange tailored to the customers’ need.

The picture above shows a 4-fold source cluster with 4 x 0.2 cm³ PBN crucibles mounted on a DN40 CF (O.D. 2.75") flange. It is equipped with a water cooling block and a special multi-position rotary motion shutter which allows to shut off 1, 2, 3 or all 4 cells. The shutter can be regulated either manually or remote by a Multi-position Shutter Control Unit MSCU .
For QCS 100 another shutter option is the use of four individual shutters mounted on the same flange. Each one of the four shutters can be opened/closed independently. Each one can be regulated manually or remote by a Rotary Pneumatic Shutter Module RPM .

Application

The use of Quad Cluster Source increases the capacity of your UHV System by using only a single port for up to four individual sources.
Possible applications are organic material deposition or other material evaporation up to about 1100°C.

Technical Data

Mounting flange	DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5")
Dimensions in vacuum QCS 40	Length : standard 220 mm (180-400 mm on request) ; Diameter : 36 mm
QCS 63	Length : standard 220 mm (180-400 mm on request); Diameter : 45 mm
Distance source-sample	Typically 100 to 160 mm
Bakeout temperature	250°C
Temperature sensor	Type K (Chromel/Alumel)
Outgassing temperature	1100°C
Operating temperature	25-1000°C
Typical power consumption QCS 40	500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A
QCS 63	500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A
Crucible material	PBN, Quartz, Al₂O₃ , etc.
Crucible nominal charge QCS 40	1-12: 0.2 cm ³
QCS 63	1-14: 0.6 cm³
Cooling	Water cooled block, 30 l/h cooling water flow, low temperature crosstalk
Shutters	integrated multi-position rotary shutter ( S )

Crucibles

Crucible sizes from 0.2 cm³ and 0.6 cm³ are frequently used in Quad Cluster Sources. Other dimensions and different shapes (cylindrical, conical) are available on request. The standard crucible material is PBN. Other crucible materials are available on request.

Dimensions

Schematic drawing QCS 40 — Schematic drawing of a Quad Cluster Source QCS 63 (drawing shows QCS 63-4x1-14-S with with multi-position shutter)

Specific data

For general information on CF mounting flanges see Flange and Gasketdimensions .

Product	CF flange	Nominal capacity	Lip diameter	Shutter*	Filament type	Thermocouple	Crucible material**	UHV dimensions*** [mm]	max. electrical [W]/[A]	Power supply product code	Crucible product code
		[cm³]	[mm]		Type	Type		[mm] / [mm]	[W] / [A]	Product code	Product code
QCS	40 -	4x1 -	12 -	S -	SF ¹ -	K -	Q -	LxxxD36	15 / 7	4x PS 15-10-C	CRU 1-12
QCS	63 -	4x1 -	14 -	S -	SF ¹ -	K -	Q -	LxxxD45	15 / 7	4x PS 15-10-C	CRU 1-14

* rotary shutter possible on same flange¹ alternatively CL ** P=PBN standard, Q=Quartz; other materials on request² alternatively HL *** specify UHV length L with order

Please contact us if you need any other source configuration.

*Example for Product code:
*
e.g. **QCS 40-4x1-10-S-SF-K-Q-L220D36

** is a Quad Cluster Source on a DN40CF flange, with four 1 cm ³ quartz crucibles (lip diameter 12 mm), integrated rotary shutter, standard filament heaters, type K thermocouple, in-vacuum length 220 mm and diameter 36 mm.