Dual Cluster Source DCS - Source Clusters -

Cluster sources increase the capacity of UHV systems
Customized with two independent and different types of effusion cells on a single flange
Two individual shutters or multi-position shutter and additional cool tube available
Minimized temperature crosstalk because of effective integrated water cooling
Various crucible types and sizes available
Very compact cell design
Surprisingly low power consumption Datasheet

Introduction

The picture above presents a Dual Cluster Source typically used for organic material or for metal evaporation with evaporants like Au, Ag, Bi, Ga, In, etc.
Two independent cells with two 0.6 cm³ crucibles are tightly arranged on a single DN40CF (O.D. 2.75") flange. This compact design allows assembling two cells in only one single source port and thus increasing the capacity of the MBE system. Effective water cooling provides minimized temperature crosstalk between both cells. It is possible to run one cell e.g. at 1300°C while the other cell keeps its temperature at 150°C.

By default the “dual” cluster sources are designed as two-cell-clusters. However we are to supply customized solutions with three or more cells, e.g., Quad Cluster Sources QCS on a single mounting flange tailored to the customer’s need.

Dual Cluster Sources built on a DN40 CF (O.D. 2.75") flange comprise two crucibles and either one multi-position rotary motion shutter or two individual rotary shutters. Different crucible sizes, shapes, materials (see second foto on the right) and different thermocouples can be provided.

Dual Cluster Sources DCS 40-2x1-14-S with multi-position shutter

In this variant is implemented one multi-position rotary shutter for various open/closed shutter position combinations that can be regulated either manually or remote by a Multi-position Shutter Control Unit MSCU.

DCS multi-position shutter — Dual Cluster Source **DCS 40-2x1-14-S** with multi-position rotary shutter and crucibles of different material (PBN and PG)

Dual Cluster Source DCS 40-2x1-14-2S with two individual shutters

This solution comprises two independently adjustable non overlapping shutters that allow individual closing or opening and establish a further reduction of thermal interaction. They can shift positions within an ambient tube.
Both shutters can be regulated manually or remote by a Rotary Pneumatic Shutter Module RPM.

DCS-2S — Two individual shutters of **DCS 40-2x1-14-2S** and crucibles of different material (PBN and Quartz)

Dual Cluster Source DCS 40-2x1-14-S-T with multi-position shutter and cool tube

In order to shield the UHV chamber from spreading evaporant especially while evaporating organic material at low temperatures the cool tube is a reasonable option.
Diffuse evaporant material will deposit inside the cool tube wall while only the sharp beam in straight direction will hit the substrate in a well defined spot.

The cool tube option is available with two individual shutters, too.
( DCS 40-2x1-14-2S-T )

DCS cool tube — DCS 40-2x1-14-S-T with multi-position rotary shutter and cupper cool tube attachment

Application

The use of source clusters increases the capacity of your UHV-System, by using only a single port for two individual sources. In surface science application the product allows you to add material deposition features into your small sample preparation system or directly in a surface analysis system.

Both independent sources of the DCS are predestined for thin film applications or for doping applications (see DDS , the dual cluster cell that is explicitly optimized for doping applications ). Different thermocouple options for high temperature or low temperature heaters are available. Low temperature cells are used for organic material (type K or type C thermocouple).

Many combinations of effusion cells are possible within Source Clusters.
For particular combinations or special designs like tilted angle crucibles see Customized Source Clusters .

Technical Data

Mounting flange	DN40CF (O.D. 2.75")
Dimensions in vacuum	Length : standard 220 mm (180-400 mm on request); Diameter : 36mm
Distance source-sample	Typically 100 to 160 mm
Bakeout temperature	250°C
Temperature sensor	Type K (Chromel/Alumel)	Type C (W5%Re/W26%Re)
Outgassing temperature	1100°C	1500°C
Operating temperature	25-1000°C	50-1400°C
Typical power consumption	500°C @ 7 W / 4 A, 1100°C @ 51 W / 7 A, 1500°C @ 112 W / 10 A
Crucibles	PBN, Quartz, Al₂O₃ , etc.; Nominal charge 600 mm³
Cooling	Water cooled block, 30 l/h cooling water flow Low temperature crosstalk: one cell 1300°C / second cell 150°C possible
Shutters	integrated multi-position rotary shutter ( S ) or individual rotary shutters ( 2S )

Power graph

The power graph on the right shows the temperature range of a DCS 40 as a function of the power consumption.

It shows typical values of one of the two effusion cells of a DCS 40 while the second cell is unimplemented.

Additionally it gives information about the reasonable dimensioning of the required power supply.

Power vs. Temperature DCS 40 — Diagram Power vs. Temperature

Crucibles

The nominal capacity of a crucible is 0.6 cm³ (600 mm ³ ). The standard crucible material is PBN ( PBN 1-14 ), but other crucible materials like PG, quartz, Al₂O₃ are also available.
A quartz crucible is typically used for organic material and some low temperature application. Pyrolytic graphite (PG) is available for some special evaporation materials like CaF₂ . Other crucible materials are available on request.

Dimensions

Schematic drawing DCS — Schematic drawing of the Dual Cluster Source DCS 40 (drawing shows DCS 40-2x1-14-2S with two integrated individual shutters

Specific data

For general information on CF mounting flanges see Flange and Gasketdimensions .

Product	CF flange	Nominal capacity	Lip diameter	Shutter*	Cool tube	Filament type	Thermocouple	Crucible material**	UHV dimensions*** [mm]	max. electrical [W]/[A]	Power supply product code	Crucible product code
		[cm³]	[mm]			Type	Type		[mm] / [mm]	[W] / [A]	Product code	Product code
DCS	40 -	2x1 -	14 -	S -		SF¹ -	C-	P -	LxxxD36	100 / 10	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	S -		SF¹ -	K-	Q	LxxxD36	50 / 7	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	2S -		SF¹ -	C-	P -	LxxxD36	110 / 10	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	2S -		SF¹ -	K-	Q	LxxxD36	50 / 7	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	S-	T-	SF¹ -	C-	P -	LxxxD36	110 / 10	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	S -	T-	SF¹ -	K-	Q	LxxxD36	50 / 7	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	2S-	T-	SF¹ -	C-	P -	LxxxD36	110 / 10	2x PS 15-10-C	PBN 1-14
DCS	40 -	2x1 -	14 -	2S -	T-	SF¹ -	K-	Q	LxxxD36	50 / 7	2x PS 15-10-C	PBN 1-14

* rotary shutter possible on same flange ¹ alternatively CL ** P=PBN; Q=Quartz; other materials on request *** specify UHV length L with order

Please contact us if you need any other source configuration.

*Example for Product code:
*
e.g. **DCS 40-2x1-14-S-T-SF-C-P-L220D36

** is a dual cluster source on a DN40CF flange, with two 0.6cm ³ PBN crucibles (lip diameter 14 mm), integrated rotary shutter, cool tube, standard filament heaters, type C thermocouple, in-vacuum length 220 mm and diameter 36 mm.