Crucibles

• All kinds of crucible shapes

• Wide range of crucible sizes

• Standard PBN crucibles

• Refractory and noble metal crucibles (W, Ta, Ir, etc.)

• Pyrolytic graphite (PG) crucibles

• Al₂O₃ , BeO and MgO crucibles

Introduction

Pyrolytic boron nitride (PBN) crucibles have become the accepted crucible material for use in MBE growth of semiconductor materials because of the material’s high purity, chemical inertness, thermal stability, low outgassing, non-wetting characteristics and long lifetime. PBN can be used for temperatures up to 1500°C. The maximum temperature decreases with rising chamber pressure. For higher temperatures or for special applications crucibles made of other materials like tungsten (W), tantalum (Ta), pyrolytic graphite (PG), silicon dioxide (quartz), aluminum oxide ( Al₂O₃), beryllium oxide (BeO), or magnesium oxide (MgO). Other crucible materials are available on request. Many of the crucibles with a cylindrical shape listed below are suitable for the additional application of a beam shaping insert BSI in order to save material and improve the uniformity of the beam.

There are special crucibles or liners for electron beam evaporators CRL. For some materials (e.g. Si or Ge) we do offer shaped charges from high purity source material, which can be use inside crucibles or crucible liners. Such shaped target materials are called Crucible targets CRT. CRL and CRT are listed on a separate page.

Specifications

Specifications The crucibles described in the following table are standard crucibles used in our MBE sources and are available as spare parts. For each crucible the respective part number, product code and suitable source type is indicated. The crucible product code specifies material, nominal capacity (in cm³) and lip diameter (in mm). The nominal capacity is consistent with the capacity of the corresponding sources. Due to special material properties (e.g. of BeO or Al₂O₃ ), the actual filling capacity may be smaller than the nominal values. Other dimensions, shapes and materials are available on request. Please contact us if you require more information. We help you select the best crucible for your particular application.

Important: All dimensions are given in millimeters and are rounded. Drawings are not to scale and shall not be used for manufacture. No responsibility is taken for the correctness of the values. The crucible product code is composed as follows:

Product code: CRU 10–22-PBN-D
Product description: Crucible with 10cm³ nominal charge, lip diameter 22mm, made from PBN, double wall
*omitted when not required

Available crucible materials

*The maximum temperature permitted during outgassing/operation can be significantly lower as listed above because it depends on several interacting factors, e.g., thermocouple type, filament material, crucible material, evaporant and application. The restriction with the lowest value leads to the final maximum admissible temperature. Please always observe the maximum temperature values specified in the respective operating instructions.

The most commonly used cylindrical, conical, and bottleneck crucibles are listed in the table below, along with their characteristic parameters and example suggestions for source type use. Most of the listed crucibles are available in the following materials: PBN, PG, Al2O3, BeO, Quartz, Ti, W, Ta, Ir, ST. For more detailed technical information or suggestions for your application please contact us

Typical sketches for crucible shapes Abbreviations for features

C - Conical shaped crucibles
B - Bottleneck
F - Funnel Extension
D - Double wall
T - Thead
L - Liner (no lip, insert)
E - Thin wall insert with hole
N - Notch

Crucible type XX-12

Crucible type XX-14

Crucible type XX-16

Crucible type XX-18

Crucible type XX-20

Crucible type XX-22

Crucible type XX-25

Crucible type XX-27

Crucible type XX-29

Crucible type XX-30

Crucible type XX-32

Crucible type XX-33

Crucible type XX-34

Crucible type XX-35

Crucible type XX-36

Crucible type XX-37

Crucible type XX-41

Crucible type XX-45

Crucible type XX-50

415-00-015	CRU 25-50-PBN	LC=22	WEZ
420-00-014	CRU 25-50-PG	LC=22	WEZ
435-00-006	CRU 25-50-BeO	LC=22	WEZ

Crucible type XX-51

Crucible type XX-54

Crucible type XX-55

Crucible type XX-58

Crucible type XX-60

Crucible type XX-71

Crucible type XX-77

Crucible type XX-78

Crucible type XX-84

Crucible type XX-90

Crucible type XX-98

Crucible type XX-102

Crucible type XX-104