Crucibles

Introduction

Pyrolytic boron nitride (PBN) crucibles have become the accepted crucible material for use in MBE growth of semiconductor materials because of the material’s high purity, chemical inertness, thermal stability, low outgassing temperature, non-wetting characteristics and long lifetime. PBN can be used for temperatures up to 1500°C. The maximum temperature decreases with rising chamber pressure. For higher temperatures or for special applications crucibles made of other materials like tungsten (W), tantalum (Ta), pyrolytic graphite (PG), silicon dioxide (quartz), aluminum oxide ( Al₂O₃), beryllium oxide (BeO), or magnesium oxide (MgO). Other crucible materials are available on request. Many of the crucibles with a cylindrical shape listed below are suitable for the additional application of a beam shaping insert BSI in order to save material and improve the uniformity of the beam.

There are special crucibles or liners (CRL) for electron beam evaporators. For some materials (e.g. Si or Ge) we offer shaped charges from high purity source material, which can be used inside crucibles or crucible liners. Such shaped target materials are called crucible targets CRT.

Specifications

The crucibles described in the following table are standard crucibles used in our MBE sources and are available as spare parts. For each crucible the respective part number, product code and suitable source type is indicated. The crucible product code specifies material, nominal capacity (in cm³) and lip diameter (in mm). The nominal capacity is consistent with the capacity of the corresponding sources. Due to special material properties (e.g. of BeO or Al₂O₃ ), the actual filling capacity may be smaller than the nominal values. Other dimensions, shapes and materials are available on request. Please contact us if you require more information. We help you select the best crucible for your particular application.

Please note that all dimensions are in millimeters and are rounded. Drawings are not to scale and shall not be used for manufacture. No responsibility is taken for the correctness of the values.

Product code

The crucible product code is composed as follows.

Product type	Nominal capacity [cm³]	Lip Diameter LD [mm]	Material	Features *
CRU	10	22	PBN	D

*omitted when not required
Product code: CRU 10–22-PBN-D
Product description: Crucible with 10 cm³ nominal charge, lip diameter 22mm, made from PBN, double wall

Available crucible materials

	Material	Max. temperature [°C]
PBN	pyrolytic boron nitride	1500
PG	pyrolytic graphite	2000
Al2O3	aluminium oxide	1600
Quartz	silicon dioxide	800
BeO	beryllium oxide	1750
Ti	titanium	800
W	tungsten	2000
Ta	tantalum	2000
Ir	iridium	2000
ST	stainless steel	300

*The maximum temperature permitted during outgassing/operation can be significantly lower as listed above because it depends on several interacting factors, e.g., thermocouple type, filament material, crucible material, evaporant and application. The restriction with the lowest value leads to the final maximum admissible temperature. Please always observe the maximum temperature values specified in the respective operating instructions.

The most commonly used cylindrical, conical, and bottleneck crucibles are listed in the table below, along with their characteristic parameters and example suggestions for source type use. Most of the listed crucibles are available in the following materials: PBN, PG, Al2O3, BeO, Quartz, Ti, W, Ta, Ir, ST. For more detailed technical information or suggestions for your application please contact us.

Typical sketches for crucible shapes

Abbreviations for features

C - Conical shaped crucibles
B - Bottleneck
F - Funnel Extension
D - Double wall
T - Thread
L - Liner (no lip, insert)
E - Thin wall insert with hole
N - Notch

Complete list of crucibles

The following list shows all available crucibles. The table is sorted by material and lip diameter.

Part number	Product code	Nominal capacity [cm³]	Lip diameter DL [mm]	Material	Length LC [mm]	Full exit angle
415-00-084	CRU 1-12-PBN	0.2	12	PBN	25	3
415-00-065	CRU 1-14-PBN	0.6	14	PBN	25	3
415-00-167	CRU 1-14-PBN-F	0.6	14	PBN	25	3
415-00-030	CRU 2-16-PBN	2	16	PBN	65	3
415-00-009	CRU 5-16-PBN	5	16	PBN	104	2
415-00-148	CRU 1-20-PBN	1.5	20	PBN	52	3
415-00-040	CRU 2-22-PBN-C16	2	22	PBN	30	16
415-00-206	CRU 6-22-PBN-D	6	22	PBN	65	2
415-00-182	CRU 6-22-PBN	6	22	PBN	65	2
415-00-189	CRU 10-22-PBN-B30(5)	10	22	PBN	105	0
415-00-006	CRU 10-22-PBN	10	22	PBN	105	2
415-00-029	CRU 10-22-PBN-D	10	22	PBN	105	2
415-00-224	CRU 10-22-PBN-F26D	10	22	PBN	105	2
415-00-056	CRU 2-25-PBN	2	25	PBN	49	0
415-00-216	CRU 5-27-PBN-	5	27	PBN	40	0
415-00-020	CRU 5-27-PBN-C20	5	27	PBN	40	20
415-00-186	CRU 8-27-PBN-B20(7)	8	27	PBN	60	0
415-00-140	CRU 8-27-PBN-C9	8	27	PBN	60	9
415-00-013	CRU 5-29-PBN-C20	5	29	PBN	41	20
415-00-024	CRU 10-32-PBN	10	32	PBN	85	2
415-00-041	CRU 25-33-PBN	25	33	PBN	89	2
415-00-007	CRU 35-34-PBN	35	34	PBN	140	2
415-00-074	CRU 10-35-PBN	10	35	PBN	50	0
415-00-057	CRU 12-36-PBN-C20	12	36	PBN	60	20
415-00-042	CRU 40-36-PBN	40	36	PBN	141	2
415-00-077	CRU 40-36-PBN-D	40	36	PBN	141	2
415-00-112	CRU 12-37-PBN-C20	12	37	PBN	60	20
415-00-014	CRU 16-37-PBN-C10	16	37	PBN	81	10
415-00-023	CRU 16-37-PBN-C10D	16	37	PBN	81	10
415-00-194	CRU 35-37-PBN-B4(8,5)FD	35	37	PBN	95	0
415-00-226	CRU 35-37-PBN-FD	35	37	PBN	88	2
415-00-034	CRU 35-37-PBN	35	37	PBN	88	2
415-00-214	CRU 35-37-PBN	35	37	PBN	88	2
415-00-067	CRU 35-37-PBN-D	35	37	PBN	88	2
415-00-227	CRU 35-37-PBN-C20F44D	35	37	PBN	88	20
415-00-032	CRU 60-37-PBN	60	37	PBN	148	1
415-00-092	CRU 60-37-PBN-D	60	37	PBN	148	1
415-00-127	CRU 24-41-PBN-C8	24	41	PBN	114	8
415-00-018	CRU 85-41-PBN	85	41	PBN	140	1
415-00-209	CRU 20-45-PBN	20	45	PBN	55	2
415-00-015	CRU 25-50-PBN	25	50	PBN	22	2
415-00-218	CRU 23-51-PBN-C28	23	51	PBN	59	28
415-00-035	CRU 25-51-PBN-C27	25	51	PBN	54	27
415-00-036	CRU 40-51-PBN-C12	40	51	PBN	109	12
415-00-147	CRU 25-54-PBN-C14	25	54	PBN	50	14
415-00-334	CRU 46-54-PBN	46	54	PBN	60	2
415-00-021	CRU 80-54-PBN-C8	80	54	PBN	107	8
415-00-086	CRU 80-54-PBN-C8D	80	54	PBN	107	8
415-00-333	CRU 80-54-PBN-C8F58D	80	54	PBN	107	8
415-00-196	CRU 130-54-PBN-B20(22)	130	54	PBN	118	0
415-00-005	CRU 60-55-PBN-C14	60	55	PBN	107	14
415-00-055	CRU 60-55-PBN-C14	60	55	PBN	107	14
415-00-011	CRU 125-55-PBN	125	55	PBN	108	2
415-00-075	CRU 130-55-PBN	130	55	PBN	118	0
415-00-332	CRU 60-58-PBN-C14D	60	58	PBN	107	14
415-00-012	CRU 200-58-PBN	200	58	PBN	152	1
415-00-043	CRU 70-60-PBN-C18	70	60	PBN	115	18
415-00-212	CRU 80-60-PBN-C16FD	80	60	PBN	95	16
415-00-044	CRU 150-60-PBN	150	60	PBN	167	2
415-00-217	CRU 155-60-PBN-B(16)FD	155	60	PBN	167	0
415-00-045	CRU 155-60-PBN	155	60	PBN	115	2
415-00-100	CRU 160-60-PBN	160	60	PBN	167	0
415-00-215	CRU 160-60-PBN	160	60	PBN	167	0
415-00-220	CRU 175-60-PBN-B(16)FD	175	60	PBN	155	0
415-00-211	CRU 175-60-PBN	175	60	PBN	155	1
415-00-170	CRU 82-71-PBN-C14	82	71	PBN	70	14
415-00-046	CRU 75-77-PBN-C26	75	77	PBN	68	26
415-00-106	CRU 150-77-PBN-C12D	150	77	PBN	140	12
415-00-185	CRU 100-78-PBN-C14D	100	78	PBN	95	14
415-00-213	CRU 100-78-PBN-C14D	100	78	PBN	95	14
415-00-038	CRU 200-84-PBN-C23	200	84	PBN	153	23
415-00-047	CRU 420-84-PBN	420	84	PBN	173	1
415-00-210	CRU 500-90-PBN	500	90	PBN	63	1
415-00-159	CRU 160-98-PBN-C30	160	98	PBN	39	30
415-00-008	CRU 200-102-PBN-C21	200	102	PBN	35	21
415-00-219	CRU 800-104-PBN	800	104	PBN	190	1
420-00-046	CRU 1-12-PG	0.2	12	PG	25	3
420-00-038	CRU 1-14-PG	0.6	14	PG	25	3
420-00-076	CRU 1-20-PG	1.5	20	PG	52	3
420-00-048	CRU 3-30-PG	3	30	PG	25	0
420-00-003	CRU 5-30-PG	5	30	PG	16	0
420-00-032	CRU 10-32-PG	10	32	PG	85	2
420-00-016	CRU 35-34-PG	35	34	PG	140	2
420-00-099	CRU 10-37-PG-C20	10	37	PG	46	20
420-00-044	CRU 35-37-PG	35	37	PG	88	2
420-00-014	CRU 25-50-PG	25	50	PG	22	2
420-00-055	CRU 35-54-PG-C14	35	54	PG	88	14
420-00-017	CRU 200-102-PG-C21	200	102	PG	35	21
430-00-083	CRU 1-12-Al2O3	0.2	12	Al2O3	24	3
430-00-080	CRU 1-14-Al2O3	0.6	14	Al2O3	25	3
430-00-044	CRU 2-16-Al2O3	2	16	Al2O3	62	3
430-00-119	CRU 1-20-Al2O3	1.5	20	Al2O3	52	3
430-00-154	CRU 6-22-Al2O3	6	22	Al2O3	63	2
430-00-042	CRU 10-22-Al2O3	10	22	Al2O3	103	2
430-00-036	CRU 5-30-Al2O3	5	30	Al2O3	15	0
430-00-002	CRU 10-32-Al2O3	10	32	Al2O3	85	2
430-00-057	CRU 25-33-Al2O3	25	33	Al2O3	91	3
430-00-085	CRU 16-36-Al2O3-C10	16	36	Al2O3	82	10
430-00-172	CRU 11-37-Al2O3-C24	11	37	Al2O3	41	24
430-00-065	CRU 12-37-Al2O3-C20	12	37	Al2O3	60	20
430-00-108	CRU 35-37-Al2O3	35	37	Al2O3	88	2
430-00-060	CRU 85-41-Al2O3	85	41	Al2O3	135	1
430-00-035	CRU 35-54-Al2O3-C14	35	54	Al2O3	86	14
430-00-004	CRU 230-98-Al2O3	230	98	Al2O3	0	0
435-00-026	CRU 1-20-BeO	1.5	20	BeO	52	3
435-00-007	CRU 10-22-BeO	10	22	BeO	105	2
435-00-005	CRU 5-30-BeO	5	30	BeO	15	0
435-00-002	CRU 10-32-BeO	10	32	BeO	85	2
435-00-014	CRU 25-33-BeO	25	33	BeO	86	3
435-00-009	CRU 35-37-BeO	35	37	BeO	89	2
435-00-017	CRU 85-41-BeO	85	41	BeO	135	0
435-00-006	CRU 25-50-BeO	25	50	BeO	22	4
435-00-003	CRU 35-54-BeO	35	54	BeO	86	0
435-00-001	CRU 35-54-BeO-C14	35	54	BeO	86	14
435-00-031	CRU 46-54-BeO	46	54	BeO	60	2
435-00-021	CRU 60-54-BeO-C14	60	54	BeO	107	14
440-00-069	CRU 1-14-Ta	0.6	14	Ta	25	3
018029	CRU 5-16-Ta-T	5	16	Ta	104	0
440-00-033	CRU 10-18-Ta	10	18	Ta	77	2
440-00-043	CRU 1-20-Ta	1.5	20	Ta	53	5
014909	CRU 10-22-Ta-T	10	22	Ta	106	0
440-00-038	CRU 10-22-Ta	10	22	Ta	105	2
440-00-060	CRU 5-30-Ta	5	30	Ta	16	0
440-00-024	CRU 10-32-Ta	10	32	Ta	86	2
440-00-046	CRU 25-33-Ta	25	33	Ta	89	2
440-00-044	CRU 35-37-Ta	35	37	Ta	89	2
440-00-080	CRU 60-37-Ta	60	37	Ta	148	1
455-00-061	CRU 1-14-W	0.6	14	W	25	3
455-00-021	CRU 10-18-W	10	18	W	77	2
455-00-069	CRU 9-22-W	9	22	W	105	2
455-00-046	CRU 10-22-W	10	22	W	105	2
455-00-030	CRU 5-30-W	5	30	W	16	0
455-00-006	CRU 10-32-W	10	32	W	86	2
455-00-028	CRU 25-33-W	25	33	W	89	2
455-00-038	CRU 35-37-W	35	37	W	89	2
455-00-067	CRU 82-58-W-C14	82	58	W	70	14
456-00-001	CRU 10-18-Ir	10	18	Ir	77	0
460-00-026	CRU 10-35-Ti-N	10	35	Ti	50	0
460-00-031	CRU 11-37-Ti-C24	11	37	Ti	42	24
460-00-014	CRU 35-37-Ti	35	37	Ti	89	2
470-00-561	CRU 10-35-ST	10	35	ST	50	0
470-00-969	CRU 180-60-ST	180	60	ST	100	0
480-00-011	CRU 1-12-Quartz	0.2	12	Quartz	24	3
480-00-014	CRU 1-14-Quartz	0.6	14	Quartz	25	3
480-00-008	CRU 2-16-Quartz	2	16	Quartz	65	3
480-00-001	CRU 10-22-Quartz	10	22	Quartz	106	0
480-00-006	CRU 2-25-Quartz	2	25	Quartz	49	0
480-00-002	CRU 35-34-Quartz	35	34	Quartz	140	2
480-00-003	CRU 10-35-Quartz	10	35	Quartz	50	1
480-00-074	CRU 11-37-Quartz-C24	11	37	Quartz	41	24
480-00-005	CRU 35-37-Quartz	35	37	Quartz	90	0
480-00-031	CRU 60-37-Quartz	60	37	Quartz	147	1

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