- Controlled evaporation of volatile organic materials in research and industry
- Fabrication of OLED and organic photovoltaic cells, or spintronic devices
- Precise deposition with no temperature overshoot (stability to ±0.05K)
- Operating temperatures 50 - 700 °C
- Dual and quad cluster arrays are offered for co-deposition processes
- ISO-K and KF cells available for HV applications Datasheet
Introduction
OEZ thermal evaporators are designed for the controlled evaporation of all types of volatile organic materials. They can be used for research or production of e.g. OLED devices, organic photovoltaic cells, molecular electronics, organic spintronics, etc.
The OEZ product line is a group of diversified sources, all characterized by excellent temperature stability, homogeneous temperature distribution within the crucible and a wide temperature range from 50 to 700 °C.
Several features and options make the OEZ a workhorse for both research and industrial applications.
The PID controlled temperature stability of ±0.05 K allows precise control of the deposition rate. The design effectively eliminates temperature hotspots and overshooting, preventing decomposition of the organic material.
Optional beam shaping devices allow high film thickness homogeneity of
the evaporated molecules along with efficient material utilization.
Depending on the crucible size, OEZ cells can be used for the
evaporation of small amounts of expensive materials (for fundamental
research applications) or for the deposition of large amounts of
organics (in industrial production processes).
Crucible replacement is quick and easy. While quartz is the preferred
material for organic evaporation, other materials such as PBN, alumina
or graphite are available.
Different models with single or multiple cells on the same flange ensure adaptability to different organic thin film applications. Crucible sizes range from 0.2 cm3 crucibles for small sample preparation, such as surface science, to 200 cm3 crucibles for samples several inches in diameter.
The rugged and reliable design inherent in every OEZ ensures long and stable operation - a basic requirement for industrial and research use.
Integrated cell shutters allow controlled sub-monolayer deposition as well as growth of thicker closed films. Automated shutter actuation can be achieved by adding electrical or pneumatic shutter modules to the assembly.
| Filament type | Ta wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF) |
| Thermocouple | NiCr/NiAl (type K) |
| Operating temperature | 50-700°C |
| Outgassing temperature | max. 1100°C |
| Bakeout temperature | 250°C |
| Cooling | integrated water cooling or separate cooling shroud |
| Crucibles | 0.2-200 cm³; Quartz, PBN, Al2O3 (other materials on request) |
| Options | integrated water cooling ( K or KK ), integrated rotary shutter ( S ) |
Dimensions
Specific data
Flange sizes marked with the letter “K” indicate KF flanges or ISO-K flanges. All flange sizes without an additional letter indicate CF flanges.
For general information on CF mounting flanges see Flange and Gasketdimensions .
| Product | CF flange | Nominal capacity | Lip diameter | Cooling | Shutter* | Filament type | Thermocouple | Crucible material** | UHV dimensions*** [mm] | max. electrical [W]/[A] | Power supply product code | Crucible product code | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| [cm³] | [mm] | Type | Type | [mm] / [mm] | [W] / [A] | Product code | Product code | ||||||
| OEZ | 40 - | 2 - | 16 - | K | S - | SF¹ - | K - | Q - | LxxxD34 | 140 / 7 | PS 15-10 | CRU 2-16 | |
| OEZ | 40 - | 10 - | 22 - | K | S - | SF² - | K - | Q - | LxxxD36 | 240 / 8 | PS 30-10 | CRU 10-22 | |
| OEZ | 50K - | 11 - | 37- | KK | S - | SF² - | K - | Q - | LxxxD46 | 200 / 10 | PS 30-10 | CRU 11-37 | |
| OEZ | 63 - | 35 - | 34 - | K | S - | SF² - | K - | Q - | LxxxD34 | 450 / 11 | PS 40-19 | CRU 35-34 | |
| OEZ | 63 - | 60 - | 37 - | K | S - | SF² - | K - | Q - | LxxxD58 | 700 / 12 | PS 40-19 | CRU 60-37 |
* rotary shutter possible on same flange ¹ alternatively CL ** Quartz standard, other materials on request ² alternatively CL, HL or DF *** specify UHV length L with order
Product code: e.g. OEZ 63-60-37-KS-DF-K-Q-L270D58 is an organic effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, Quartz crucible, in-vacuum length 270mm and diameter 58mm.
