- State-of-the-art MBE system for semiconductor device production
- Applications: III/V, II/VI or other material heterostructures
- 12 large source ports
- Substrate sizes 8", 6" or 4x3" or 7x2” wafers, with face-down geometry
- Fully automated wafer transfer
- Extensive in-situ characterization capability
- Professional support by PhD MBE experts
General Information
The OCTOPLUS 800 allows the MBE growth on multi wafer 3 inch or single wafer 6 inch or 8 inch substrates. It exhibits 12 large source ports for high capacity effusion cells, valved crackers and other sources. Depending on the application, the substrate manipulator applies to Graphite, SiC, free standing tungsten or tantalum heaters with PBN diffusor plate. The OCTOPLUS 800 MBE system offers highly reproducible sample quality, it is field-proven and ideally suited for III/V, II/VI and other compound semiconductor layer growth for applications in production of semiconductor devices.
The OCTOPLUS 800 is in use in leading research institutes and industrial laboratories. On demand we provide a list of references. Please contact our sales department for further information.
Technical Data
| Size of deposition chamber | 800 mm I.D. |
| Base pressure | < 5x10-11 mbar |
| Pumping | TSP, ion getter pump, cryopump and/or turbopump |
| Cooling Shroud | LN2 or other cooling liquid on request |
| Substrate heater temperature | up to 800°C, or up to 1000°C |
| Substate size | up to 8´´ or multi-wafer platen |
| Bakeout temperature | up to 200°C |
| Source ports | 12 ports DN125CF / DN150CF |
| Source types | effusion cells, e-beam evaporators, sublimation sources, valved cracker sources, gas sources |
| Shutters | soft-acting linear shutters |
| In-situ monitoring | ion gauge, QCM, pyrometer, RHEED, QMA, temperature control by kSA or Laytec, wafer curvature etc. |
| Sample transfer | fully automatic in face-down geometry |
| Load lock | magazine with 10 substrates, with rapid pump down |
| MBE control software | Tiny Tusker |
| Service | system installation and acceptance testing |
| MBE training | by MBE experts with extensive application know-how |
