Multi-position Shutter Control Unit MSCU
Multi-position Shutter Control Unit
MSCU
The MSCU is the power supply and controller for multi-position shutter modules. You may choose between manual and remote controlled shutter operation.
Rotary Pneumatic Module RPM
Rotary Pneumatic Module
RPM
The RPM is a drive unit for rotary shutter motion. Its torque reaches 0.85 Nm at 6 bar air supply.
Shutter
Shutter
We provide a variety of cell shutters designed for different evaporation sources. The shutter can be operated manually or by a soft-acting shutter module.
Shutter Control Unit SCU
Shutter Control Unit
SCU
The SCU is the power supply and controller for different soft-acting shutter modules. You may choose between manual and remote controlled shutter operation.
Soft-acting Linear Shutter Module LSM
Soft-acting Linear Shutter Module
LSM
The LSM consists of a soft-acting linear motion mechanism, driven by an electric motor and acting upon a magnetically coupled linear motion feedthrough.
Soft-acting Rotary Shutter Module RSM
Soft-acting Rotary Shutter Module
RSM
The RSM is a drive unit for rotary shutter motion that provides a "soft", nearly sinusoidal angular velocity profile between two angular shutter positions.
Viewport Shutter FSH
Viewport Shutter
FSH
The Viewport Shutters FSH are high-quality swing shutters used to cover and protect all kinds of viewports in UHV systems.