- Full PBN solution for corrosive materials like Te, Sb, Se, As, Mg
- DN40CF ( O.D. 2.75" ) mounting flange c ompatible with all MBE systems
- Thermal cracking up to 1300°C
- 35 cm3 or 130 cm3 PBN crucible
- Excellent thermal isolation between low temperature reservoir and hot cracking zone
- Integrated water cooling for cracker stage
- Integrated rotary shutter Datasheet
Introduction
The Thermal Cracker Cell TCC is an effusion cell equipped with a cracker stage with integrated water cooling shroud on its space-saving DN40CF ( O.D. 2.75") flange. The cell features a crucible size of 35 cm 3 or 130 cm3 which is sufficient for most R&D applications.
The TCC is designed for evaporation of materials at operation temperatures from 100°C to 650°C with an additional cracker stage on the end of the injector tube that provides temperatures up to 1300°C.
The crucible is heated by a tantalum wire heater. The standard crucible material suitable for most evaporants is PBN.
The shielding of the crucible is reduced to optimize the cell for low temperature operation. That way a good flux control for high vapor pressure materials is possible without using an additional valve.
The crucible and cracker zones are shrouded by water cooling therefore the thermal load on the chamber is neglectable.
This is realized by excellent thermal insulation between the low temperature reservoir and the hot cracking zone.
The figure on the left shows the temperature response of tube and crucible in case of heating the cracker only.
The temperature is measured by thermocouples on application critical positions: within the cracker zone, the tube and at the bottom of the crucible.
Even at cracker temperatures around maximum temperature of 1300°C the temperatures of tube and crucible stay unaffected to a large extend.
Application
A source concept like this is used for high vapor pressure materials, which form atom clusters. Typical evaporation elements are As, Se, Sb, Te, Mg.
| General | |
| Mounting flange | DN40CF (O.D. 2.75") |
| In-vacuum length L | 220 mm or 287 mm |
| In-vacuum maximum total length TL | 240 mm or 307 mm |
| Maximum airside length OL | 405 mm |
| In-vacuum diameter D | 36 mm |
| Maximum airside radius AR | 106 mm |
| Shutter distance DS | 15 mm |
| Shutter opening angle | 90° ccw |
| Bakeout temperature | 200°C |
| Cooling water flow | 30-90 l/h |
| Weight | 13 kg |
| Maximum chamber pressure | 10-5 mbar |
Reservoir | |
| Heater type | Ta wire filament |
| Thermocouple | NiCr/NiAl (type K) |
| Operating temperature | 100°C – 650°C |
| Outgassing temperature | Up to 700°C |
| Cooling | Integrated water cooling shroud |
| Crucible capacity | 35 cm3 or 130 cm3 |
| Crucible material | PBN |
Tube | |
| Heater type | Ta wire filament |
| Thermocouple | W5%Re/W26%/Re (type C) |
| Operating temperature | 200°C – 800°C |
| Outgassing temperature | Up to 850°C |
| Cooling | None |
| Tube material | PBN |
Cracker | |
| Heater type | Ta wire filament |
| Thermocouple | W5%Re/W26%/Re (type C) |
| Operating temperature | 300°C – 1200°C |
| Outgassing temperature | Up to 1300°C |
| Cooling | Integrated water cooling shroud |
| Cracking insert material | PBN |
Crucibles
The most commonly used crucible material suitable for most evaporants is PBN; other materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles .
Dimensions
Specific data
For general information on CF mounting flanges see Flange and Gasketdimensions .
| Product | CF flange | Nominal capacity | Lip diameter | Cooling | Shutter* | UHV dimensions*** [mm] | max. electrical [W]/[A] | Power supply product code | Crucible product code | |
|---|---|---|---|---|---|---|---|---|---|---|
| [cm³] | [mm] | [mm]/[mm] | [W] / [A] | Product code | Product code | |||||
| TCC | 40 - | 35 - | 37 - | K | S- | LxxxD36 | reservoir 300/8 tube 100/5 cracker 150/8 | PS 36-12 PS 36-12** PS 36-12 | CRU 35-37 | |
| TCC | 40 - | 130 - | 54 - | K | S- | LxxxD36 | reservoir 400/8 tube 100/5 cracker 150/8 | PS 60-10 PS 36-12** PS 36-12 | CRU 130-54 |
* rotary shutter possible on same flange ** optional *** specify UHV length L with order (L=220 mm or L=287 mm)
Product code:
e.g. TCC 40-130-54-KS-P-L220C36
is a Thermal Cracker Cell on DN40 CF-flange for an 130 cm³ crucible (lip Ø 54 mm), with integrated water cooling shroud, shutter, PBN crucible, in-vacuum length 220 mm and outer diameter 36 mm.
