Atomic Carbon Sublimation Source SUKO-A

Atomic Carbon Sublimation Source SUKO-A
  • Thermal sublimation of atomic carbon
  • Refractory metal tube filament filled with ultrapure carbon
  • Only pyrolytic graphite and tantalum parts in hot area
  • Water-cooled power feedthrough
  • Cooling shroud and shutter optionally available
  • Compatible with UHV analysis systems and MBE growth chambers

 Datasheet

Introduction

The Carbon Sublimation Source SUKO-A provides pure, highly reactive atomic carbon with a vast majority of C1 instead of the large percentage of C2 and C3 clusters (~75%) that are naturally released during the sublimation of graphite.

The extraordinary filament consists of a refractory metal tube, filled with carbon. At temperatures above 1800°C, carbon diffuses through the tube and sublimates from its outer surface. The tube itself acts like a filter, letting only atomic carbon pass.

SUKO-A assembly
Main parts of the SUKO-A assembly

The University of Jena patented this technique in collaboration with Dr. Eberl MBE-Komponenten GmbH. Several publications dealing with the Atomic Carbon Sublimation Source SUKO-A  have already been published. They are listed in section References / List of Publications .

Disturbing outgassing of undesirable material is effectively prevented by the proven design of the SUKO-A, using solely pyrolytic graphite around the filament.

The power feedthrough is water-cooled and process safe without any water or vacuum welding seam.

Direct heating of the filament by a DC power supply enables reliable and easy handling.

Appearance and dimensions of the SUKO-A are similar to the well-proven standard Carbon Sublimation Source SUKO . In fact, with a few spare parts users can convert every existing SUKO source into a SUKO-A, and vice versa, in their own laboratory.

The SUKO-A is available in two sizes, on either DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5") flange. It can be easily mounted into common UHV analysis systems or MBE growth chambers.

Cooling shroud and shutter, highly recommended for the majority of applications, are optionally available.

The following table shows the required electrical power and typical flux rates at 100 mm working distance of the currently available SUKO-A models.

Source typeMounting flangeElectrical powerCarbon flux
SUKO-A 40DN40CF (O.D. 2.75")500 W0.1 nm/min
SUKO-A 63DN63CF (O.D. 4.5")1000 W0.5 nm/min

Technical Data

Mounting flange
DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5")
Dimensions in vacuumL=250-400 mm, D=36 or D=55 mm
Filament typerefractory metal tube filled with carbon
Filament shieldingfilament completely shielded with PG parts
ThermocoupleW5%Re/W26%Re (type C)
Bakeout temperaturemax. 250°C
Operation temperaturemax. filament temperature 2300°C
Electrical contactswater-cooled (4x Swagelok fitting connection O.D. 6 mm); water flow min. 30 l/h
Coolingseparate water (or LN2 ) cooling shroud
Optionsintegrated rotary shutter ( S )

Dimensions

Schematic drawing SUKO
Schematic drawing of the Atomic Carbon Sublimation Source SUKO-A (drawing shows SUKO-A 40)

Specific data

For general information on CF mounting flanges see Flange and Gasketdimensions .

ProductCF flangeShutter*UHV dimensions***
[mm]
max. electrical
[W]/[A]
Growth rate**Power supply
product code
[mm] / [mm][W] / [A][nm/min]Product code
SUKO-A40 -LxxxD36500 / 750.1PS 20-76
SUKO-A63 -S -LxxxD551000 / 1100.5PS 20-120

* rotary shutter possible on same flange ** maximum growth rate at 100mm distance *** specify UHV length L with order

Product code: e.g. SUKO-A 63-S-L300D55 is an atomic carbon sublimation source on DN63 CF-flange with shutter, in-vacuum length 300mm and diameter 55mm.