Low Temperature Effusion Cell NTEZ

Applicable in most UHV systems
Evaporation of metals, compounds and organic materials between 80°C and 1000°C
Crucible capacities from 2 to 200 cm³
Robust, reliable tantalum wire heating system
Excellent temperature stability and controllability

Optional on-flange integrated cooling shroud and shutter

Introduction

The Low Temperatur Effusion Cell NTEZ is designed for evaporation of materials with high vapor pressure, requiring an extremely good temperature regulation and reproducibility, e.g. alkali metals or organic materials. NTEZ cells can be used in the operating temperature range 80-1000°C.

To achieve best temperature stability and controllability the complete heater, thermocouple and shielding construction of the NTEZ is optimized for low temperature operation.
In contrast, standard effusion cells, e.g. WEZ , are provided with an extensive heat shielding for operation at elevated temperatures. This shielding however hampers the heat radiation, which makes it difficult to regulate such cells at lower temperatures.

Similar to standard effusion cells, the crucible is heated by a tantalum wire filament supported by PBN rings. This wire heater concept provides for excellent temperature uniformity within the crucible, an effective heating even at the crucible lip, and allows the use of differently shaped crucibles.
Standard filament SF , hot lip filament HL and dual filament DF heaters are available, meeting the differing requirements of the evaporation materials and applications.

Standard crucible materials are PBN (pyrolytic boron nitride) for metals and compounds, and quartz for organic materials. Other crucible materials are available upon request.

WEZ wire heater — Schematic of the wire heating assembly

Application

The low temperature effusion cell NTEZ is recommended for materials with high vapor pressure, e.g. organic materials, As, Sb, Ba, Bi, K, Li, Mg, Ca, CdSe, etc., which are all evaporated or sublimated at temperatures below 1000°C.

The NTEZ is used for sample preparation, thin film growth and MBE applications. The very compact model NTEZ 40-10-22-KS, for example, is particularly suited to material deposition on small samples in surface analysis systems.

For MBE applications we offer sources tailored to the different evaporation material requirements. NTEZ cells can be used both for growth and doping applications.

Please refer to DEZ Doping Effusion Cells for cells that are explicitly optimized and specialized for doping application.

NTEZ 40-10-22-KS close-up — NTEZ 40-10-22-KS-SF view onto standard filament

Technical Data

Filament type	Ta wire heating filament: standard ( SF ), hot lip ( HL ), dual ( DF )
Thermocouple	NiCr/NiAl (type K), (type C on request)
Operating temperature	80-1000°C (specify expected temperature range when ordering)
Outgassing temperature	max. 1100°C, depending on cell design (max. 800°C with quartz crucible)
Bakeout temperature	250°C
Cooling	integrated water cooling or separate cooling shroud
Crucibles	2-200 cm³; PBN, quartz, Al₂O₃ crucibles (other materials on request)
Options	integrated water cooling shroud ( K ), integrated shutter ( S )

Crucibles

In order to ensure compatibility with all MBE systems, NTEZ cells are conveniently available with a wide range of standard crucibles of different shapes and sizes. Most of the crucibles are cylindrical, but conical shapes with taper angles up to 10° are available as well.
For the majority of metals and compunds within the approved temperature range PBN is the recommended crucible material. Quartz crucibles are used for the evaporation of organics. Other crucible materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles .

The second number of the product code is the nominal crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify crucible material, if not PBN.

Dimensions

Schematic drawing NTEZ — Schematic drawing of the Low Temperature Effusion Cell NTEZ (drawing shows NTEZ 40-10-22-S)

Specific data

For general information on CF mounting flanges see Flange and Gasketdimensions .

Product	CF flange	Nominal capacity	Lip diameter	Cooling	Shutter*	Filament type	Thermocouple	Crucible material**	UHV dimensions*** [mm]	max. electrical [W]/[A]	Power supply product code	Crucible product code
		[cm³]	[mm]			Type	Type		[mm] / [mm]	[W] / [A]	Product code	Product code
NTEZ	16 -	2 -	16 -			SF -	K -	P -	LxxxD16	55 / 5	PS 15-10	PBN 2-16
NTEZ	40 -	2 -	16 -			SF -	K -	P -	LxxxD16	50 / 4	PS 15-10	PBN 2-16
NTEZ	40 -	2 -	16 -		S -	SF -	K -	P -	LxxxD34	85 / 6	PS 15-10	PBN 2-16
NTEZ	40 -	2 -	16 -	K	S -	SF -	K -	P -	LxxxD34	80 / 6	PS 15-10	PBN 2-16
NTEZ	40 -	10 -	22 -		S -	SF¹ -	K -	P -	LxxxD34	165 / 8	PS 30-10	PBN 10-22
NTEZ	40 -	10 -	22 -	K	S -	SF¹ -	K -	P -	LxxxD36	150 / 7	PS 30-10	PBN 10-22
NTEZ	40 -	25 -	33 -		S -	SF¹ -	K -	P -	LxxxD33	210 / 10	PS 30-10	PBN 10-22
NTEZ	40 -	35 -	34 -		S -	SF¹ -	K -	P -	LxxxD34	340 / 10	PS 40-19	PBN 35-34
NTEZ	40 -	12 -	37 -			SF¹ -	K -	P -	LxxxD37	200 / 11	PS 30-25	PBN C12-37
NTEZ	40 -	35 -	37 -			SF¹ -	K -	P -	LxxxD37	305 / 9	PS 40-19	PBN 35-37
NTEZ	40 -	60 -	37 -			SF¹ -	K -	P -	LxxxD37	340 / 10	PS 40-19	PBN 60-37
NTEZ	63 -	35 -	34 -	K	S -	SF¹ -	K -	P -	LxxxD57	310 / 10	PS 40-19	PBN 35-34
NTEZ	63 -	35 -	37 -		S -	SF¹ -	K -	P -	LxxxD56	230 / 10	PS 30-10	PBN 35-37
NTEZ	63 -	60 -	37 -		S -	SF¹ -	K -	P -	LxxxD56	335 / 10	PS 40-19	PBN 60-37
NTEZ	63 -	60 -	37 -	K	S -	SF¹ -	K -	P -	LxxxD57	335 / 10	PS 40-19	PBN 60-37

* rotary shutter possible on same flange ¹ alternatively HL or DF ** PBN standard, other materials on request *** specify UHV length L with order

Product code: e.g. **NTEZ 63-60-37-KS-DF-K-P-L270D58 ** is a low temperature effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, PBN crucible, in-vacuum length 270mm and diameter 58mm.