- Linear multihearth UHV e-beam evaporator
- full UHV integrity by hermetic all-metal sealed design, low outgassing
- Bakeout temperature 200°C
- Best product for evaporation of Silicon
- Evaporation origin aligned on flange centre
- Reliable manual linear translation, optional motorized translation with optical positioning
- Hearth volumes 8 cm³ (x4 or x6); 15cm³ (x3 or x6)
- Long filament life with 270° beam deflection
- High frequency beam deflection system Datasheet
Introduction
MBE-Komponenten GmbH is pleased to offer you a new range of multihearth electron beam evaporators for use in ultra-high vacuum (UHV) applications: EBVM 200/250-4x8, -6x8, -3x15 and -6x15, optional with integrated source shutter.
Our Multi-pocket Evaporators combine great flexibility in evaporating up to four different materials from a single source for your thin film growth requirements with a compact design based on a horizontal DN200CF or DN250CF flange. All electrical and utility feedthroughs are included on this support flange, allowing easy integration into your UHV system. For easy installation and system maintenance we provide an optional mounting guide rod system. See the picture on the right.
On the EBVM only UHV-grade materials are used without any compromise.
The electromagnetic deflection coils are manufactured from Kapton
TM (polyimide) isolated wires and nickel-plated magnetic
steel, the permanent magnets are of a high temperature rare earth alloy
and the multihearth crucible is manufactured from high purity
OFHC-copper (Oxygen-Free High-Conductivity copper).
Individual water cooling circuits of both, fixed and movable parts of
the copper hearth assembly, ensure cool operation and low outgassing
even at high power operation.
Optionally, the EBVM can be equipped with a linear shutter. A customized water-cooled roof can be installed on request. The standard manual pocket translation can be upgraded with a motorized pocket indexing drive with position feedback for the drive controller.
The minimum flange to pocket centre distance is 250 mm depending on crucible number and size, and can be increased to adapt to your system. We are pleased to assist you in integrating the EBVM into your existing UHV system. Don’t hesitate to contact us for further information and advice for your special application.
Technical Data
| Mounting Flange | DN200CF (O.D. 10") / DN250CF (O.D. 12") |
| in-vacuum Diameter | 195 mm / 245 mm |
| in-vacuum Length | for 4x8 cm3 and 3x15 cm3 : 250 mm / for 6x8 cm3 : 330 mm / for 6x15 cm3 : 350 mm |
| Crucible capacities | 8 cm³ or 15 cm³ |
| Hearth dimensions (Ø x depth) | Ø30 mm (15° taper) x 15 mm or Ø37,8 mm (15° taper) x 17 mm |
| Filament type | short-legged coil of thick W wire, electron emitting filament |
| Bakeout temperature | 200°C (all air side connectors removed) |
| Operating pressure | 5 × 10-11 mbar ….1 × 10-5 mbar |
| Acceleration voltage | 4 - 10 kV |
| Beam power | max. 6 kW, (or 3 kW; depending on power supply) |
| Filament current | max. 50 A at 10 V (AC) |
| Spot size | 5 mm diameter, approx |
| Primary beam deflection | 270° by permanent magnet system |
| Dynamic beam deflection | coils wound from KAPTONTM - isolated wire; x-deflection current: ± 3 A; y-deflection current: ± 3 A; deflection frequency: max. 150 Hz |
| Cooling | water cooling, connectors SwagelokTM Ø6 mm and Ø8 mm (air side); water flow rate 6 l/min at 3 bar |
| Options | integrated source shutter (S) with manual push-pull action or with
soft-acting drive unit LSM 40-100 water cooling roof motorized pocket indexing drive |
Dimensions
Specific data
For general information on CF mounting flanges see Flange and Gasketdimensions .
| Product | CF flange | Nominal capacity | Cooling | Shutter* | UHV dimensions*** [mm] | TL | max. electrical [W]/[A] | Power supply product code | |
|---|---|---|---|---|---|---|---|---|---|
| [cm³] | [mm] / [mm] | [mm] | [kW] / [mA] | Product code | |||||
| EBVM | 200 - | 4x8 - | K** | S** | LxxxD195 | L+160 | 6 / 600 | HV | |
| EBVM | 200 - | 6x8 - | K** | S** | LxxxD195 | L+250 | 6 / 600 | HV | |
| EBVM | 200 - | 3x15 - | K** | S** | LxxxD195 | L+160 | 6 / 600 | HV | |
| EBVM | 200 - | 6x15 - | K** | S** | LxxxD195 | L+290 | 6 / 600 | HV | |
| EBVM | 250 - | 4x8 - | K | S | LxxxD240 | L+160 | 6 / 600 | HV | |
| EBVM | 250 - | 6x8 - | K | S | LxxxD240 | L+250 | 6 / 600 | HV | |
| EBVM | 250 - | 3x15 - | K | S | LxxxD240 | L+160 | 6 / 600 | HV | |
| EBVM | 250 - | 6x15 - | K | S | LxxxD240 | L+290 | 6 / 600 | HV |
* manual or automated shutter actuation (with LSM 40-100) ** only one option at a time, either K or S *** specify UHV length L with order
