10x10mm² substrate, max. 6 ports
10x10mm² substrate max. 9 ports
up to 2-inch substrate, max. 8 ports
3-inch substrate, max. 12 ports
up to 6-inch substrate, max. 12 ports
up to 8-inch substrate, max. 12 ports
OCTOPLUS-O for Oxides
Thermal evaporation up to 2000°C
Deposition by powerful electron beam
Sample manipulators and wafer heaters
Evaporation with enhanced flux control
Sources for p- and n-type doping
Thermal and plasma gas crackers
Evaporators for R&D and industry
Evaporators for volatile molecules
Multiple crucibles on a single flange
Bayard-Alpert type ionization gauges
Bakeable power and TC extension lines
Water and LN2 cooled adapters
Overview of crucible shapes and sizes
Annealing oven for 10x10mm² samples
Rotary and linear shutter equipment
SiGe and compound semiconductor devices
Explore new and exotic electronic states
Quantum-dots/-wires, roll-up-/nano-tubes
CIGS, CZTS and CdTe applications
Magnetic material devices
Single layers of atoms or molecules
Metallization of substrates by PVD
Electronics based on organic molecules
Superconductors and high-k dielectrics
Materials with conducitve surface states
Dr. Eberl MBE-Komponenten GmbH
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