The crucibles described in the following are standard crucibles used in our MBE sources. They are available as spare parts.
On this page
All kinds of crucible shapes
Wide range of crucible sizes
Standard PBN crucibles
Refractory and noble metal crucibles (W, Ta, Ir, etc.)
Pyrolytic graphite (PG) crucibles
Al2O3 , BeO and MgO crucibles
Introduction
Pyrolytic boron nitride (PBN) crucibles have become the accepted crucible material for use in MBE growth of semiconductor materials because of the material’s high purity, chemical inertness, thermal stability, low outgassing, non-wetting characteristics and long lifetime.
PBN can be used for temperatures up to 1500°C. The maximum temperature decreases with rising chamber pressure.
For higher temperatures or for special applications crucibles made of other materials like tungsten (W), tantalum (Ta), pyrolytic graphite (PG), silicon dioxide (quartz), aluminum oxide ( Al2O3), beryllium oxide (BeO), or magnesium oxide (MgO).
Other crucible materials are available on request.
Many of the crucibles with a cylindrical shape listed below are suitable for the additional application of a beam shaping insert BSI in order to save material and improve the uniformity of the beam.
There are special crucibles or liners for electron beam evaporators CRL. For some materials (e.g. Si or Ge) we do offer shaped charges from high purity source material, which can be use inside crucibles or crucible liners. Such shaped target materials are called Crucible targets CRT. CRL and CRT are listed on a separate page.
Specifications
Specifications
The crucibles described in the following table are standard crucibles used in our MBE sources and are available as spare parts. For each crucible the respective part number, product code and suitable source type is indicated.
The crucible product code specifies material, nominal capacity (in cm³) and lip diameter (in mm). The nominal capacity is consistent with the capacity of the corresponding sources. Due to special material properties (e.g. of BeO or Al2O3 ), the actual filling capacity may be smaller than the nominal values.
Other dimensions, shapes and materials are available on request. Please contact us if you require more information. We help you select the best crucible for your particular application.
Important:
All dimensions are given in millimeters and are rounded. Drawings are not to scale and shall not be used for manufacture.
No responsibility is taken for the correctness of the values.
The crucible product code is composed as follows:
Product type
Nominal capacity [cm³]
Lip Diameter (LD)
Material
Features *
CRU
10
22
PBN
D
Product code: CRU 10–22-PBN-D Product description: Crucible with 10cm³ nominal charge, lip diameter 22mm, made from PBN, double wall *omitted when not required
Available crucible materials
PBN
pyrolytic boron nitride
1500
PG
pyrolytic graphite
2000
Al2O3
aluminium oxide
1600
Quartz
silicon dioxide
800
BeO
beryllium oxide
1750
Ti
titanium
800
W
tungsten
2000
Ta
tantalum
2000
Ir
iridium
2000
ST
stainless steel
300
*The maximum temperature permitted during outgassing/operation can be significantly lower as listed above because it depends on several interacting factors, e.g., thermocouple type, filament material, crucible material, evaporant and application.
The restriction with the lowest value leads to the final maximum admissible temperature. Please always observe the maximum temperature values specified in the respective operating instructions.
The most commonly used cylindrical, conical, and bottleneck crucibles are listed in the table below, along with their characteristic parameters and example suggestions for source type use.
Most of the listed crucibles are available in the following materials: PBN, PG, Al2O3, BeO, Quartz, Ti, W, Ta, Ir, ST.
For more detailed technical information or suggestions for your application please contact us
Typical sketches for crucible shapes
Abbreviations for features
C - Conical shaped crucibles B - Bottleneck F - Funnel Extension D - Double wall T - Thead L - Liner (no lip, insert) E - Thin wall insert with hole N - Notch