Crucibles

The crucibles described in the following are standard crucibles used in our MBE sources. They are available as spare parts.

Standard PBN crucibles
Crucibles of different shapes and sizes


  • All kinds of crucible shapes

  • Wide range of crucible sizes

  • Standard PBN crucibles

  • Refractory and noble metal crucibles (W, Ta, Ir, etc.)

  • Pyrolytic graphite (PG) crucibles

  • Al2O3 , BeO and MgO crucibles

Introduction

Pyrolytic boron nitride (PBN) crucibles have become the accepted crucible material for use in MBE growth of semiconductor materials because of the material’s high purity, chemical inertness, thermal stability, low outgassing, non-wetting characteristics and long lifetime. PBN can be used for temperatures up to 1500°C. The maximum temperature decreases with rising chamber pressure. For higher temperatures or for special applications crucibles made of other materials like tungsten (W), tantalum (Ta), pyrolytic graphite (PG), silicon dioxide (quartz), aluminum oxide ( Al2O3), beryllium oxide (BeO), or magnesium oxide (MgO). Other crucible materials are available on request. Many of the crucibles with a cylindrical shape listed below are suitable for the additional application of a beam shaping insert BSI in order to save material and improve the uniformity of the beam.

There are special crucibles or liners for electron beam evaporators CRL. For some materials (e.g. Si or Ge) we do offer shaped charges from high purity source material, which can be use inside crucibles or crucible liners. Such shaped target materials are called Crucible targets CRT. CRL and CRT are listed on a separate page.

Standard PBN crucibles


Standard PBN crucibles

Specifications

Specifications The crucibles described in the following table are standard crucibles used in our MBE sources and are available as spare parts. For each crucible the respective part number, product code and suitable source type is indicated. The crucible product code specifies material, nominal capacity (in cm³) and lip diameter (in mm). The nominal capacity is consistent with the capacity of the corresponding sources. Due to special material properties (e.g. of BeO or Al2O3 ), the actual filling capacity may be smaller than the nominal values. Other dimensions, shapes and materials are available on request. Please contact us if you require more information. We help you select the best crucible for your particular application.

Important: All dimensions are given in millimeters and are rounded. Drawings are not to scale and shall not be used for manufacture. No responsibility is taken for the correctness of the values. The crucible product code is composed as follows:

Product typeNominal capacity [cm³]Lip Diameter (LD)MaterialFeatures *
CRU1022PBND

Product code: CRU 10–22-PBN-D
Product description: Crucible with 10cm³ nominal charge, lip diameter 22mm, made from PBN, double wall
*omitted when not required

Available crucible materials

PBNpyrolytic boron nitride1500
PGpyrolytic graphite2000
Al2O3aluminium oxide1600
Quartzsilicon dioxide800
BeOberyllium oxide1750
Tititanium800
Wtungsten2000
Tatantalum2000
Iriridium2000
STstainless steel300

*The maximum temperature permitted during outgassing/operation can be significantly lower as listed above because it depends on several interacting factors, e.g., thermocouple type, filament material, crucible material, evaporant and application. The restriction with the lowest value leads to the final maximum admissible temperature. Please always observe the maximum temperature values specified in the respective operating instructions.

The most commonly used cylindrical, conical, and bottleneck crucibles are listed in the table below, along with their characteristic parameters and example suggestions for source type use. Most of the listed crucibles are available in the following materials: PBN, PG, Al2O3, BeO, Quartz, Ti, W, Ta, Ir, ST. For more detailed technical information or suggestions for your application please contact us

Standard PBN crucibles


Standard PBN crucibles


1

2

3

Typical sketches for crucible shapes Abbreviations for features

C - Conical shaped crucibles
B - Bottleneck
F - Funnel Extension
D - Double wall
T - Thead
L - Liner (no lip, insert)
E - Thin wall insert with hole
N - Notch


Part numberProduct codeNominal capacity
[cm³]
Lip diameter DL
[mm]
MaterialLength LC
[mm]
Full exit angle
415-00-084CRU 1-12-PBN0.212PBN253
415-00-065CRU 1-14-PBN0.614PBN253
415-00-167CRU 1-14-PBN-F0.614PBN253
415-00-030CRU 2-16-PBN216PBN653
415-00-009CRU 5-16-PBN516PBN1042
415-00-148CRU 1-20-PBN1.520PBN523
415-00-040CRU 2-22-PBN-C16222PBN3016
415-00-206CRU 6-22-PBN-D622PBN652
415-00-182CRU 6-22-PBN622PBN652
415-00-189CRU 10-22-PBN-B30(5)1022PBN1050
415-00-006CRU 10-22-PBN1022PBN1052
415-00-029CRU 10-22-PBN-D1022PBN1052
415-00-224CRU 10-22-PBN-F26D1022PBN1052
415-00-056CRU 2-25-PBN225PBN490
415-00-216CRU 5-27-PBN-527PBN400
415-00-020CRU 5-27-PBN-C20527PBN4020
415-00-186CRU 8-27-PBN-B20(7)827PBN600
415-00-140CRU 8-27-PBN-C9827PBN609
415-00-013CRU 5-29-PBN-C20529PBN4120
415-00-024CRU 10-32-PBN1032PBN852
415-00-041CRU 25-33-PBN2533PBN892
415-00-007CRU 35-34-PBN3534PBN1402
415-00-074CRU 10-35-PBN1035PBN500
415-00-057CRU 12-36-PBN-C201236PBN6020
415-00-042CRU 40-36-PBN4036PBN1412
415-00-077CRU 40-36-PBN-D4036PBN1412
415-00-112CRU 12-37-PBN-C201237PBN6020
415-00-014CRU 16-37-PBN-C101637PBN8110
415-00-023CRU 16-37-PBN-C10D1637PBN8110
415-00-194CRU 35-37-PBN-B4(8,5)FD3537PBN950
415-00-226CRU 35-37-PBN-FD3537PBN882
415-00-034CRU 35-37-PBN3537PBN882
415-00-214CRU 35-37-PBN3537PBN882
415-00-067CRU 35-37-PBN-D3537PBN882
415-00-227CRU 35-37-PBN-C20F44D3537PBN8820
415-00-032CRU 60-37-PBN6037PBN1481
415-00-092CRU 60-37-PBN-D6037PBN1481
415-00-127CRU 24-41-PBN-C82441PBN1148
415-00-018CRU 85-41-PBN8541PBN1401
415-00-209CRU 20-45-PBN2045PBN552
415-00-015CRU 25-50-PBN2550PBN222
415-00-218CRU 23-51-PBN-C282351PBN5928
415-00-035CRU 25-51-PBN-C272551PBN5427
415-00-036CRU 40-51-PBN-C124051PBN10912
415-00-147CRU 25-54-PBN-C142554PBN5014
415-00-334CRU 46-54-PBN4654PBN602
415-00-021CRU 80-54-PBN-C88054PBN1078
415-00-086CRU 80-54-PBN-C8D8054PBN1078
415-00-333CRU 80-54-PBN-C8F58D8054PBN1078
415-00-196CRU 130-54-PBN-B20(22)13054PBN1180
415-00-005CRU 60-55-PBN-C146055PBN10714
415-00-055CRU 60-55-PBN-C146055PBN10714
415-00-011CRU 125-55-PBN12555PBN1082
415-00-075CRU 130-55-PBN13055PBN1180
415-00-332CRU 60-58-PBN-C14D6058PBN10714
415-00-012CRU 200-58-PBN20058PBN1521
415-00-043CRU 70-60-PBN-C187060PBN11518
415-00-212CRU 80-60-PBN-C16FD8060PBN9516
415-00-044CRU 150-60-PBN15060PBN1672
415-00-217CRU 155-60-PBN-B(16)FD15560PBN1670
415-00-045CRU 155-60-PBN15560PBN1152
415-00-100CRU 160-60-PBN16060PBN1670
415-00-215CRU 160-60-PBN16060PBN1670
415-00-220CRU 175-60-PBN-B(16)FD17560PBN1550
415-00-211CRU 175-60-PBN17560PBN1551
415-00-170CRU 82-71-PBN-C148271PBN7014
415-00-046CRU 75-77-PBN-C267577PBN6826
415-00-106CRU 150-77-PBN-C12D15077PBN14012
415-00-185CRU 100-78-PBN-C14D10078PBN9514
415-00-213CRU 100-78-PBN-C14D10078PBN9514
415-00-038CRU 200-84-PBN-C2320084PBN15323
415-00-047CRU 420-84-PBN42084PBN1731
415-00-210CRU 500-90-PBN50090PBN631
415-00-159CRU 160-98-PBN-C3016098PBN3930
415-00-008CRU 200-102-PBN-C21200102PBN3521
415-00-219CRU 800-104-PBN800104PBN1901
420-00-046CRU 1-12-PG0.212PG253
420-00-038CRU 1-14-PG0.614PG253
420-00-076CRU 1-20-PG1.520PG523
420-00-048CRU 3-30-PG330PG250
420-00-003CRU 5-30-PG530PG160
420-00-032CRU 10-32-PG1032PG852
420-00-016CRU 35-34-PG3534PG1402
420-00-099CRU 10-37-PG-C201037PG4620
420-00-044CRU 35-37-PG3537PG882
420-00-014CRU 25-50-PG2550PG222
420-00-055CRU 35-54-PG-C143554PG8814
420-00-017CRU 200-102-PG-C21200102PG3521
430-00-083CRU 1-12-Al2O30.212Al2O3243
430-00-080CRU 1-14-Al2O30.614Al2O3253
430-00-044CRU 2-16-Al2O3216Al2O3623
430-00-119CRU 1-20-Al2O31.520Al2O3523
430-00-154CRU 6-22-Al2O3622Al2O3632
430-00-042CRU 10-22-Al2O31022Al2O31032
430-00-036CRU 5-30-Al2O3530Al2O3150
430-00-002CRU 10-32-Al2O31032Al2O3852
430-00-057CRU 25-33-Al2O32533Al2O3913
430-00-085CRU 16-36-Al2O3-C101636Al2O38210
430-00-172CRU 11-37-Al2O3-C241137Al2O34124
430-00-065CRU 12-37-Al2O3-C201237Al2O36020
430-00-108CRU 35-37-Al2O33537Al2O3882
430-00-060CRU 85-41-Al2O38541Al2O31351
430-00-035CRU 35-54-Al2O3-C143554Al2O38614
430-00-004CRU 230-98-Al2O3-23098Al2O300
435-00-026CRU 1-20-BeO1.520BeO523
435-00-007CRU 10-22-BeO1022BeO1052
435-00-005CRU 5-30-BeO530BeO150
435-00-002CRU 10-32-BeO1032BeO852
435-00-014CRU 25-33-BeO2533BeO863
435-00-019CRU 35-37-BeO-L3537BeO00
435-00-009CRU 35-37-BeO3537BeO892
435-00-017CRU 85-41-BeO8541BeO1350
435-00-006CRU 25-50-BeO2550BeO224
435-00-003CRU 35-54-BeO-3554BeO860
435-00-001CRU 35-54-BeO-C143554BeO8614
435-00-031CRU 46-54-BeO4654BeO602
435-00-021CRU 60-54-BeO-C146054BeO10714
440-00-069CRU 1-14-Ta0.614Ta253
018029CRU 5-16-Ta-T516Ta1040
440-00-033 CRU 10-18-Ta1018Ta772
440-00-043CRU 1-20-Ta1.520Ta535
014909CRU 10-22-Ta-T1022Ta1060
440-00-038CRU 10-22-Ta1022Ta1052
440-00-060CRU 5-30-Ta530Ta160
440-00-024CRU 10-32-Ta1032Ta862
440-00-046CRU 25-33-Ta2533Ta892
440-00-044CRU 35-37-Ta3537Ta892
440-00-080CRU 60-37-Ta6037Ta1481
455-00-061CRU 1-14-W0.614W253
455-00-021CRU 10-18-W1018W772
455-00-069CRU 9-22-W922W1052
455-00-046CRU 10-22-W1022W1052
455-00-030CRU 5-30-W530W160
455-00-006CRU 10-32-W1032W862
455-00-028CRU 25-33-W2533W892
455-00-038CRU 35-37-W3537W892
455-00-067CRU 82-58-W-C148258W7014
456-00-001CRU 10-18-Ir1018Ir770
460-00-026CRU 10-35-Ti-N1035Ti500
460-00-031CRU 11-37-Ti-C241137Ti4224
460-00-014CRU 35-37-Ti3537Ti892
470-00-561CRU 10-35-ST1035ST500
470-00-969CRU 180-60-ST18060ST1000
480-00-011CRU 1-12-Quartz0.212Quartz243
480-00-014CRU 1-14-Quartz0.614Quartz253
480-00-008CRU 2-16-Quartz216Quartz653
480-00-001CRU 10-22-Quartz1022Quartz1060
480-00-006CRU 2-25-Quartz225Quartz490
480-00-002CRU 35-34-Quartz3534Quartz1402
480-00-003CRU 10-35-Quartz1035Quartz501
480-00-074CRU 11-37-Quartz-C241137Quartz4124
480-00-005CRU 35-37-Quartz3537Quartz900
480-00-031CRU 60-37-Quartz6037Quartz1471

Crucible type XX-12

415-00-084CRU 1-12-PBNLC=25WEZ
420-00-046CRU 1-12-PGLC=25WEZ
430-00-083CRU 1-12-Al2O3LC=24WEZ
480-00-011CRU 1-12-QuartzLC=24WEZ

Crucible 1-12

Crucible type XX-14

415-00-065CRU 1-14-PBNLC=25WEZ
415-00-167CRU 1-14-PBN-FLC=25WEZ
420-00-038CRU 1-14-PGLC=25WEZ
430-00-080CRU 1-14-Al2O3LC=25WEZ
440-00-069CRU 1-14-TaLC=25WEZ
455-00-061CRU 1-14-WLC=25WEZ
480-00-014CRU 1-14-QuartzLC=25WEZ

Crucible 1-14

Crucible type XX-16

415-00-030CRU 2-16-PBNLC=65WEZ
430-00-044CRU 2-16-Al2O3LC=62WEZ
480-00-008CRU 2-16-QuartzLC=65WEZ
415-00-009CRU 5-16-PBNLC=104WEZ
018029CRU 5-16-Ta-TLC=104WEZ

PBN 2-16 Crucible 5-16

Crucible type XX-18

440-00-033 CRU 10-18-TaLC=77WEZ
455-00-021CRU 10-18-WLC=77WEZ
456-00-001CRU 10-18-IrLC=77WEZ

Crucible 10-18

Crucible type XX-20

415-00-148CRU 1-20-PBNLC=52WEZ
420-00-076CRU 1-20-PGLC=52WEZ
430-00-119CRU 1-20-Al2O3LC=52WEZ
435-00-026CRU 1-20-BeOLC=52WEZ
440-00-043CRU 1-20-TaLC=53WEZ

Crucible 1-20 BeO 1-20

Crucible type XX-22

415-00-040CRU 2-22-PBN-C16LC=30WEZ
415-00-206CRU 6-22-PBN-DLC=65WEZ
415-00-182CRU 6-22-PBNLC=65WEZ
430-00-154CRU 6-22-Al2O3LC=63WEZ
455-00-069CRU 9-22-WLC=105WEZ
415-00-189CRU 10-22-PBN-B30(5)LC=105WEZ
415-00-006CRU 10-22-PBNLC=105WEZ
415-00-029CRU 10-22-PBN-DLC=105WEZ
415-00-224CRU 10-22-PBN-F26DLC=105WEZ
430-00-042CRU 10-22-Al2O3LC=103WEZ
435-00-007CRU 10-22-BeOLC=105WEZ
014909CRU 10-22-Ta-TLC=106WEZ
440-00-038CRU 10-22-TaLC=105WEZ
455-00-046CRU 10-22-WLC=105WEZ
480-00-001CRU 10-22-QuartzLC=106WEZ

Crucible C2-22 PBN 6-22 Crucible 10-22

Crucible type XX-25

415-00-056CRU 2-25-PBNLC=49WEZ
480-00-006CRU 2-25-QuartzLC=49WEZ

Quartz 2-25

Crucible type XX-27

415-00-216CRU 5-27-PBN-LC=40WEZ
415-00-020CRU 5-27-PBN-C20LC=40WEZ
415-00-186CRU 8-27-PBN-B20(7)LC=60WEZ
415-00-140CRU 8-27-PBN-C9LC=60WEZ

PBN C5-27 Crucible C8-27

Crucible type XX-29

415-00-013CRU 5-29-PBN-C20LC=41WEZ

Crucible C5-29

Crucible type XX-30

420-00-048CRU 3-30-PGLC=25WEZ
420-00-003CRU 5-30-PGLC=16WEZ
430-00-036CRU 5-30-Al2O3LC=15WEZ
435-00-005CRU 5-30-BeOLC=15WEZ
440-00-060CRU 5-30-TaLC=16WEZ
455-00-030CRU 5-30-WLC=16WEZ

Crucible 5-30 Crucible 5-30

Crucible type XX-32

415-00-024CRU 10-32-PBNLC=85WEZ
420-00-032CRU 10-32-PGLC=85WEZ
430-00-002CRU 10-32-Al2O3LC=85WEZ
435-00-002CRU 10-32-BeOLC=85WEZ
440-00-024CRU 10-32-TaLC=86WEZ
455-00-006CRU 10-32-WLC=86WEZ

Crucible 10-32

Crucible type XX-33

415-00-041CRU 25-33-PBNLC=89WEZ
430-00-057CRU 25-33-Al2O3LC=91WEZ
435-00-014CRU 25-33-BeOLC=86WEZ
440-00-046CRU 25-33-TaLC=89WEZ
455-00-028CRU 25-33-WLC=89WEZ

Crucible 25-33

Crucible type XX-34

415-00-007CRU 35-34-PBNLC=140WEZ
420-00-016CRU 35-34-PGLC=140WEZ
480-00-002CRU 35-34-QuartzLC=140WEZ

Crucible 35-34

Crucible type XX-35

415-00-074CRU 10-35-PBNLC=50WEZ
460-00-026CRU 10-35-Ti-NLC=50WEZ
470-00-561CRU 10-35-STLC=50WEZ
480-00-003CRU 10-35-QuartzLC=50WEZ

Crucible 10-35

Crucible type XX-36

415-00-057CRU 12-36-PBN-C20LC=60WEZ
430-00-085CRU 16-36-Al2O3-C10LC=82WEZ
415-00-042CRU 40-36-PBNLC=141WEZ
415-00-077CRU 40-36-PBN-DLC=141WEZ

Crucible C12-36 Crucible C12-37 Crucible 40-36

Crucible type XX-37

420-00-099CRU 10-37-PG-C20LC=46WEZ
430-00-172CRU 11-37-Al2O3-C24LC=41WEZ
460-00-031CRU 11-37-Ti-C24LC=42WEZ
480-00-074CRU 11-37-Quartz-C24LC=41WEZ
415-00-112CRU 12-37-PBN-C20LC=60WEZ
430-00-065CRU 12-37-Al2O3-C20LC=60WEZ
415-00-014CRU 16-37-PBN-C10LC=81WEZ
415-00-023CRU 16-37-PBN-C10DLC=81WEZ
415-00-194CRU 35-37-PBN-B4(8,5)FDLC=95WEZ
415-00-226CRU 35-37-PBN-FDLC=88WEZ
415-00-034CRU 35-37-PBNLC=88WEZ
415-00-214CRU 35-37-PBNLC=88WEZ
415-00-067CRU 35-37-PBN-DLC=88WEZ
415-00-227CRU 35-37-PBN-C20F44DLC=88WEZ
420-00-044CRU 35-37-PGLC=88WEZ
430-00-108CRU 35-37-Al2O3LC=88WEZ
435-00-009CRU 35-37-BeOLC=89WEZ
440-00-044CRU 35-37-TaLC=89WEZ
455-00-038CRU 35-37-WLC=89WEZ
460-00-014CRU 35-37-TiLC=89WEZ
480-00-005CRU 35-37-QuartzLC=90WEZ
415-00-032CRU 60-37-PBNLC=148WEZ
415-00-092CRU 60-37-PBN-DLC=148WEZ
440-00-080CRU 60-37-TaLC=148WEZ
480-00-031CRU 60-37-QuartzLC=147WEZ

Crucible C12-37 Crucible 35-37 Crucible 60-37

Crucible type XX-41

415-00-127CRU 24-41-PBN-C8LC=114WEZ
415-00-018CRU 85-41-PBNLC=140WEZ
430-00-060CRU 85-41-Al2O3LC=135WEZ
435-00-017CRU 85-41-BeOLC=135WEZ

Crucible 85-41

Crucible type XX-45

415-00-209CRU 20-45-PBNLC=55WEZ

Crucible type XX-50

415-00-015CRU 25-50-PBNLC=22WEZ
420-00-014CRU 25-50-PGLC=22WEZ
435-00-006CRU 25-50-BeOLC=22WEZ

Crucible 25-50
PBN/PG
Crucible 25-50
BeO

Crucible type XX-51

415-00-218CRU 23-51-PBN-C28LC=59WEZ
415-00-035CRU 25-51-PBN-C27LC=54WEZ
415-00-036CRU 40-51-PBN-C12LC=109WEZ

Crucible C40-51 Crucible C25-51

Crucible type XX-54

415-00-147CRU 25-54-PBN-C14LC=50WEZ
420-00-055CRU 35-54-PG-C14LC=88WEZ
430-00-035CRU 35-54-Al2O3-C14LC=86WEZ
435-00-003CRU 35-54-BeO-LC=86WEZ
435-00-001CRU 35-54-BeO-C14LC=86WEZ
415-00-334CRU 46-54-PBNLC=60WEZ
435-00-031CRU 46-54-BeOLC=60WEZ
435-00-021CRU 60-54-BeO-C14LC=107WEZ
415-00-021CRU 80-54-PBN-C8LC=107WEZ
415-00-086CRU 80-54-PBN-C8DLC=107WEZ
415-00-333CRU 80-54-PBN-C8F58DLC=107WEZ
415-00-196CRU 130-54-PBN-B20(22)LC=118WEZ

Crucible 130-54 Crucible 125-54 Crucible C80-54 Crucible C60-54 Crucible C35-54

Crucible type XX-55

415-00-005CRU 60-55-PBN-C14LC=107WEZ
415-00-055CRU 60-55-PBN-C14LC=107WEZ
415-00-011CRU 125-55-PBNLC=108WEZ
415-00-075CRU 130-55-PBNLC=118WEZ

Crucible type XX-58

415-00-332CRU 60-58-PBN-C14DLC=107WEZ
455-00-067CRU 82-58-W-C14LC=70WEZ
415-00-012CRU 200-58-PBNLC=152WEZ

Crucible 200-58

Crucible type XX-60

415-00-043CRU 70-60-PBN-C18LC=115WEZ
415-00-212CRU 80-60-PBN-C16FDLC=95WEZ
415-00-044CRU 150-60-PBNLC=167WEZ
415-00-217CRU 155-60-PBN-B(16)FDLC=167WEZ
415-00-045CRU 155-60-PBNLC=115WEZ
415-00-100CRU 160-60-PBNLC=167WEZ
415-00-215CRU 160-60-PBNLC=167WEZ
415-00-220CRU 175-60-PBN-B(16)FDLC=155WEZ
415-00-211CRU 175-60-PBNLC=155WEZ
470-00-969CRU 180-60-STLC=100WEZ

Crucible 160-60 Crucible 160-60 Crucible 150-60 Crucible CC70-60

Crucible type XX-71

415-00-170CRU 82-71-PBN-C14LC=70WEZ

Crucible C82-71

Crucible type XX-77

415-00-046CRU 75-77-PBN-C26LC=68WEZ
415-00-106CRU 150-77-PBN-C12DLC=140WEZ

Crucible type XX-78

415-00-185CRU 100-78-PBN-C14DLC=95WEZ
415-00-213CRU 100-78-PBN-C14DLC=95WEZ

Crucible type XX-84

415-00-038CRU 200-84-PBN-C23LC=153WEZ
415-00-047CRU 420-84-PBNLC=173WEZ

Crucible 420-84 Crucible C200-84

Crucible type XX-90

415-00-210CRU 500-90-PBNLC=63WEZ

Crucible type XX-98

415-00-159CRU 160-98-PBN-C30LC=39WEZ

Crucible type XX-102

415-00-008CRU 200-102-PBN-C21LC=35WEZ
420-00-017CRU 200-102-PG-C21LC=35WEZ

Crucible 200-102

Crucible type XX-104

415-00-219CRU 800-104-PBNLC=190WEZ