Products for applications in fabrication of oxides and dielectrics
Applications in fabrication of
Oxides and Dielectrics
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We develop oxide MBE systems and components for the deposition of oxide films in UHV systems. The products applied for the deposition of high TC superconductors yttrium barium copper oxide (YBCO) layers, metal oxides (like SrTiO3), high k-dielectics as well as ZnO and other oxide materials. The MBE system and the components are designed to operate in a reactive oxygen environment. Substrate manipulators for these applications are equipped with oxygen resistant Pt or SiC heaters. Electron beam evaporation as well as special thermal evaporation sources are used for vacuum deposition of oxide layers. Sputter sources can be integrated upon request. |
 E-Beam Evaporation |
Oxide MBE Systems
 OCTOPLUS-O 400 |
MBE Components for oxide layer deposition
 Oxigen Resistant Substrate Manipulator SH-O |
 Oxygen Resistant Effusion CellsOREZ |
 High Temperature Effusion CellsHTEZ |
 E-Beam Evaporators |
 Oxygen Atom Beam SourceOBS |
 Free Microplasma Source FMP |
