MBE system for small samples (10x10 mm²) with up to 6 ports for effusion cells
MBE system for small samples (10x10 mm²) with up to 9 ports for effusion cells
MBE system for up to 6´´ or 3x3´´ samples with up to 12 ports for effusion cells and automated transfer option
MBE system for 300 mm silicon wafer and very large capacity sources like 1000 cc e-beam-evaporators
Multi cluster MBE systems - Avaliable with automated central sample transfer or with manual transfer