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Keyword: Organic Material Effusion Cell OEZ

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RPM manipulator DCS Cooling Shrouds CS LN2 cooling shroud PVD valved thermal deposition source Cs/Rb-Valved Alkali Metal Source AKS SH-O mask Thermostar Knudsen cell linear vapor source metal evaporation PEZ III-V MBE DECO MCU SiGe MBE organic evaporator thermal evaporation atomic hydrogen VGCS VSS plasma source sample transfer Organic Material Effusion Cell OEZ Verdampferquelle Oxygen Resistant Substrate Manipulator SH-O Soft-acting Rotary Shutter Module RSM

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