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Keyword: OLED lighting evaporation system

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SH-O mask Thermostar linear vapor source PEZ e-beam evaporator valved cracker RPM DCS Linearverdampfer Cooling Shrouds CS valved thermal deposition source LN2 cooling shroud Cs/Rb-Valved Alkali Metal Source AKS sample transfer plasma source Organic Material Effusion Cell OEZ Oxygen Resistant Substrate Manipulator SH-O Dotierzelle rapid thermal annealing Soft-acting Rotary Shutter Module RSM DECO WEZ MCU thermal evaporation SiGe MBE VGCS OLED MBE VSS sulfurization

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