Applications in Metal Deposition
We engineer and manifacture metal deposition systems as well as thermal
evaporation sources up to 2000°C, single and multi-pocket electron beam
evaporators for metal layer deposition. Physical vapor deposition (PVD)
systems are equipped with sputter sources upon request.
A mini Rapid Thermal Annealing system is available for contact
formation, re-crystallization processes and intermixing processes.
Examples:
- Magnetic material devices (memories, tunnel junctions)
- Al Contact deposition for OLEDs
- Au, Ag deposition for device contacts
- Au-assisted nano-wire fabrication
UHV Deposition and Annealing Systems
Components for Metal Deposition
High Temperature Effusion Cell HTEZ
Effusion Cells
E-Beam Evaporators
Production Scale Linear Evaporation Source LES
Point Sources
